2006
DOI: 10.1021/ac0610107
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Detection and Discrimination Capabilities of a Multitransducer Single-Chip Gas Sensor System

Abstract: The performance of a single-chip, three-transducer, complementary metal oxide semiconductor gas sensor microsystem has been thoroughly evaluated. The monolithic gas sensor system includes three polymer-coated transducers, a mass-sensitive cantilever, a thermoelectric calorimetric sensor, and an interdigitated capacitive sensor that are integrated along with all electronic circuits needed to operate these sensors. The system additionally includes a temperature sensor and a serial interface unit so that it can b… Show more

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Cited by 36 publications
(48 citation statements)
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References 44 publications
(92 reference statements)
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“…The increased number of total points is due to the fact that we had both a "wet" and "dry" log K PDMS-water value for trichloromethane (log K PDMS-water (wet) = 1.71 [37] and log K PDMS-water (dry) = 1.62 [35]) and trichloroethylene (log K PDMS-water (wet) = 2.41 [38] and log K PDMS-water (dry) = 2.24 [21]). Figure 2 compares the calculated values of log K PDMS-water based on Eq.…”
Section: Resultsmentioning
confidence: 99%
“…The increased number of total points is due to the fact that we had both a "wet" and "dry" log K PDMS-water value for trichloromethane (log K PDMS-water (wet) = 1.71 [37] and log K PDMS-water (dry) = 1.62 [35]) and trichloroethylene (log K PDMS-water (wet) = 2.41 [38] and log K PDMS-water (dry) = 2.24 [21]). Figure 2 compares the calculated values of log K PDMS-water based on Eq.…”
Section: Resultsmentioning
confidence: 99%
“…Generally, the multidimensional transduction devices were mainly classified two categories. Several different transducers with optical, mass-sensitive, and capacitive properties were designed by mechanically incorporating on a single-chip microsensor system (GutierrezOsuna and Hierlemann, 2010;Hagleitner et al, 2001;Jin et al, 2008;Kurzawski et al, 2006). However, the assembly of such multidimensional sensor requires circuit design, semiconductor chip fabrication and packaging.…”
Section: Introductionmentioning
confidence: 99%
“…The multitransducer system has been described in detail earlier (9,34) so that we only include little information here: It comprises three polymer-coated transducers, a capacitive, a mass-sensitive and a calorimetric transducer along with all necessary front-end and signal conditioning circuitry on a 7 by 7 mm 2 CMOS chip (9,(35)(36)(37).…”
Section: Introductionmentioning
confidence: 99%