Designing a Non‐Volatile Imaging Switch for Mass‐Persistent, Chemically Amplified Photolithography: A Model Study.

Abstract

Carboxylic acidsCarboxylic acids Q 0420 Designing a Non-Volatile Imaging Switch for Mass-Persistent, Chemically Amplified Photolithography: A Model Study. -The acid-catalyzed rearrangement of bicyclic lactone (II) into the phenolic carboxylic acid (IV) is tested for potential use in chemically amplified microlithographic imaging. -(KLOPP, J. M.; BENSEL, N.; FRESCO, Z. M.; FRECHET*, J. M. J.; Chem. Commun. (Cambridge) 2002, 24, 2956-2957; Dep. Chem., Univ. Calif., Berkeley, CA 94720, USA; Eng.) -M. Paetzel 13-084