Designed Structures of Interdigital Electrodes for Thin Film SAW Devices
Yicong Qian,
Yao Shuai,
Chuangui Wu
et al.
Abstract:This paper studied the impact of the microstructure of interdigital electrodes on the performance of surface acoustic wave (SAW) resonators and proposed an innovative piston, dummy finger and tilt (PDT) structure, which was then applied to the GLONASS L3 band filters. Through the adoption of 3D finite element simulation (FEM), photolithography, and testing on an incredible high-performance surface acoustic wave (I.H.P. SAW) substrate, it is concluded that the total aperture length is 20T (T is period), resulti… Show more
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