Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude

Abstract

We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase-and amplitude-shaping, and an X-shaped laterally reinforced spring preventing lateral snap-in while providing high flexibility for both degrees of freedom.

Spectral phase, amplitude, and spatial modulation from ultraviolet to infrared with a reflective MEMS pulse shaper

“…A throughout description of the MEMS chip and driving electronics is given in the accompanying technical paper [17]. The device is bulk-micromachined from a silicon-on-insulator wafer with a 35-μm-thick device layer using delayed-mask deep reactive ion etching.…”

“…In the last section, we discuss other prospective and yet unexplored possibilities opened by this additional degree of freedom in terms of combined phase-and spatial-shaping. The present paper, which illustrates the optical implementation and characterization of our new device is complemented by a technical manuscript, which describes in full details the MEMS chip design, actuation, and electronics [17].…”

Direct amplitude shaping of high harmonics in the extreme ultraviolet

“…The approach we present here is based on a MEMS reflective device that we have recently developed [16]. The latter, which has already proven successful for pulse-shaping of deep UV pulses [16], has been adapted to amplitude shaping of HHs in the XUV.…”

“…The latter, which has already proven successful for pulse-shaping of deep UV pulses [16], has been adapted to amplitude shaping of HHs in the XUV. We show independent control over the intensity of each high harmonic in the 14 − 36 eV range, which leads to the control over the temporal structure of the attosecond pulses in the train as we show through explicit calculations in the last section.…”

Optimal Dynamic Discrimination in Tryptophan-Containing Dipeptides

“…Moreover this method has shown high discrimination power in the fluorescence depletion experiment for two essential aromatic amino acids: tryptophan and tyrosine. By use of acousto-optic programmable dispersive filter (AOPDF), commercially known as Dazzler (Fastlite), fluorescence modulation was achieved with a contrast of 35% [4].…”