Design, Simulation and Optimization of Circular, Square and Hexagonal Shaped Diaphragms for PMUT Application

Bhargav, G.; Sharma, Akshdeep

doi:10.1007/978-981-19-2308-1_46

Cited by 2 publications

(2 citation statements)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The resonant frequency of the PMUTs is chosen to be around 12 MHz in fluid. For square diaphragm PMUTs, the first-order resonant frequency f 1 (in air) can be calculated by the following equation [21]:…”

Section: Device Designmentioning

confidence: 99%

Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment

Wang,

Ji,

Wang

et al. 2024

J. Micromech. Microeng.

View full text Add to dashboard Cite

In this paper, we successfully developed the 24 × 31 piezoelectric micromachined ultrasound transducers (PMUTs) array with 8 inch CMOS compatible processes. Scandium aluminum nitride (ScxAl1−xN) thin film (x = 20%) was used as the piezoelectric material. The PMUTs array was fabricated on 8-inch cavity silicon-on-insulator (CSOI) wafers with the device silicon layer thickness of only 3um and a cavity pitch of 59 μm. The wafer-level electrical test was conducted using inline auto-prober and the yield rate > 90% was achieved across the 8-inch wafer. The following acoustic test on our PMUTs array (1.5 mm × 2.0 mm) indicated the transmit sensitivity of 18.4 kPa/V @ 10 mm @ 11.6 MHz in oil with −3 dB bandwidth of 2.3 MHz. In order to validate the potential of using PMUTs array for biomedical treatments, subsequent ultrasonic heating experiments were carried out on a silicone block. A temperature rise of 4 ℃ was achievable in about 50 seconds. These results demonstrate that the potential of using PMUTs array as a disposable biomedical device in many therapeutic applications, for example, a treatment for dry eye disease.

show abstract

Section: Device Designmentioning

confidence: 99%

Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment

Wang,

Ji,

Wang

et al. 2024

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…Moreover, due to the simple vibration modes of these structures, factors that influence the motion can be easily predicted. Other reported diaphragm structures include rectangular [31], hexagonal [32], I-shape [33], etc. For example, Eovino et al [34] developed a ring-shaped PMUT which consisted of a ringshaped cavity and a center post.…”

Section: Pmut Structuresmentioning

confidence: 99%

Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications

Wan

Jiang

et al. 2022

Biosensors

View full text Add to dashboard Cite

The objective of this article is to review the recent advancement in piezoelectric micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric materials, device fabrication and characterization, as well as applications. PMUT has been an active research topic since the late 1990s because of the ultrasound application needs of low cost large 2D arrays, and the promising progresses on piezoelectric thin films, semiconductors, and micro/nano-electromechanical system technology. However, the industrial and medical applications of PMUTs have not been very significant until the recent success of PMUT based fingerprint sensing, which inspired growing interests in PMUT research and development. In this paper, recent advances of piezoelectric materials for PMUTs are reviewed first by analyzing the material properties and their suitability for PMUTs. PMUT structures and the associated micromachining processes are next reviewed with a focus on the complementary metal oxide semiconductor compatibility. PMUT prototypes and their applications over the last decade are then summarized to show the development trend of PMUTs. Finally, the prospective future of PMUTs is discussed as well as the challenges on piezoelectric materials, micro/nanofabrication and device integration.

show abstract

Design, Simulation and Optimization of Circular, Square and Hexagonal Shaped Diaphragms for PMUT Application

Cited by 2 publications

References 13 publications

Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment

Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment

Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications

Contact Info

Product

Resources

About