Abstract:The Design Rule Manual (DRM) is a critical component in the introduction and release of new technology nodes. It is the reference manual of definitive requirements, documented in detail, on all information regarding design rules and technology node design requirements. The DRM is a contract between the foundry and the designer. Designs must meet all documented requirements to be accepted for manufacture. The DRM’s critical role in process design enablement obligates it to a very high quality standard. The DRM … Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.