Design optimization of phase-shifting point diffraction interferometer

Liu, Ke; Li, Yanqiu

doi:10.1117/12.806760

Cited by 4 publications

(1 citation statement)

References 4 publications

(4 reference statements)

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“…It provides the means to measure the shape of an optical wavefront. There are many highly accurate wavefront sensing technologies, such as Shack-Hartmann wavefront sensor [1] (SHS), lateral shearing interferometer [2], point diffraction interferometer [3], etc. Among these techniques mentioned above, SHS has been widely used for its wide dynamic range, real-time measurement, and the relatively simple configuration [1,4].…”

Section: Introductionmentioning

confidence: 99%

Wide dynamic range wavefront sensor using sub-wavelength grating array

Liang

Liu

2015

Optics Communications

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Section: Introductionmentioning

confidence: 99%

Wide dynamic range wavefront sensor using sub-wavelength grating array

Liang

Liu

2015

Optics Communications

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Calibration method to characterize the accuracy of phase-shifting point diffraction interferometer

Liu¹,

Li²,

Wang³

2011

Review of Scientific Instruments

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Characterization of measurement accuracy of the phase-shifting point diffraction interferometer (PS∕PDI) is usually performed by two-pinhole null test. In this procedure, the geometrical coma and detector tilt astigmatism systematic errors are almost one or two magnitude higher than the desired accuracy of PS∕PDI. These errors must be accurately removed from the null test result to achieve high accuracy. Published calibration methods, which can remove the geometrical coma error successfully, have some limitations in calibrating the astigmatism error. In this paper, we propose a method to simultaneously calibrate the geometrical coma and detector tilt astigmatism errors in PS∕PDI null test. Based on the measurement results obtained from two pinhole pairs in orthogonal directions, the method utilizes the orthogonal and rotational symmetry properties of Zernike polynomials over unit circle to calculate the systematic errors introduced in null test of PS∕PDI. The experiment using PS∕PDI operated at visible light is performed to verify the method. The results show that the method is effective in isolating the systematic errors of PS∕PDI and the measurement accuracy of the calibrated PS∕PDI is 0.0088λ rms (λ = 632.8 nm).

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Front Matter: Volume 10616

Wang¹,

Sheng²,

Tatsuno³

2018

2017 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments

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show abstract

Design optimization of phase-shifting point diffraction interferometer

Cited by 4 publications

References 4 publications

Wide dynamic range wavefront sensor using sub-wavelength grating array

Wide dynamic range wavefront sensor using sub-wavelength grating array

Calibration method to characterize the accuracy of phase-shifting point diffraction interferometer

Front Matter: Volume 10616

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