Design optimization of machinery mounting systems with an elastic support structure

Abstract

An elastic support-based optimization model is developed for a machinery mounting system comprising a vibrating machine supported on an elastic structure by multiple resilient mounts. This model is used to investigate the design optimization of an X−Y motion stage mounting system used in microelectronics wire-bonding equipment. By varying the stiffness coefficients of the resilient mounts while constraining the dynamic displacement amplitudes of the X−Y motion stage, the total force transmitted from the X−Y motion stage (the vibrating machine) to the equipment table (the elastic support structure) is minimized at each frequency interval in the frequency range of interest for different stiffnesses of the equipment table. The results show that, when the equipment table is relatively flexible, the total transmitted force minimized by the model developed is significantly lower than that minimized using a conventional rigid support-based optimization model at some critical frequency. When the equipment table is sufficiently rigid, both models provide almost the same predictions of the total transmitted force.

Minimization of vibration power transmission from rotating machinery to a flexible supporting plate

“…(4), (12), and (17) by applying the conditions of force equilibrium and motion compatibility in Eq. (13).…”

“…(25) is obtained by solving Eqs. (4), (12), and (17) with the conditions of force equilibrium and motion compatibility in Eq. (13),…”

“…Papers 8-10 assume a rigid supporting structure, but in the present case, the machinery is to be installed on a relatively°exible supporting plate. Based on a°e xible support model, Ashra¯uon 11 studied design optimization of aircraft enginemount systems for vibration isolation, and Xie et al 12 considered optimization of the mounting system for microelectronics manufacturing equipment using the receptance matrix method. In these works, minimization of the transmitted force from the vibrating machine to the receiver is chosen as the design objective.…”

On joint mobility design in multi-structural systems

“…1 For example, rubber mounts and bushes are used in passenger cars to isolate the passenger cabin from road excitations and/or powertrain vibrations. 2 Vibration isolation is a traditional research topic in many application areas such as vehicles, 2,3 machinery systems 4–6 and spacecraft. 7–11…”

“…18,22 In vehicle systems, this difficulty can be partly overcome by allocating optimal stiffnesses and dampings for each bush and mount in a system model. 4,6,23 However, in the early design stages, the system mode is usually not available. Furthermore, when designing the structural sides of the mounting parts, more complex situations can be encountered owing to the couplings between substructures.…”