Design of x-y-θz large-stroke uncoupled parallel piezoelectric positioning platform
Zhiyi Hu,
Xingyang Xie,
Yuguo Cui
et al.
Abstract:This paper introduces the design of a three-degree-of-freedom parallel piezoelectric micro-platform with simple and compact structure, large stroke and no coupling. Firstly, the driving unit of the micro-moving platform is designed by using the flexible bridge amplifier mechanism of double-layer flexible thin plate, and the platform body of the micro-moving platform is designed based on the double-parallelogram flexible mechanism, and then a new configuration of the x-y-θz parallel piezoelectric micro-moving p… Show more
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