Design of X-ray supermirrors

Кожевников, И. В.; Bukreeva, Inna; Ziegler, Eric

doi:10.1016/s0168-9002(00)01079-2

Cited by 99 publications

(48 citation statements)

References 31 publications

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“…Notice that all approaches result in non-monotonic oscillating variation of the layer thickness with depth, even though the desired profile of the reflectivity curve is very simple (for example, constant). Actually, as it was theoretically proved in [2], the monotone variation of the period with the depth always results in strongly oscillating reflectivity curve. The inverse statement is also valid: MM providing smooth change of the reflectivity curve is always characterized by nonmonotonic variation of the period, which often oscillates strongly with the depth.…”

Section: Introductionmentioning

confidence: 84%

“…More accurate choice of the starting guess, as, e.g., in [2], proves to be unnecessary, because the reflectivity bandwidth is only twice of that of a periodic MM.…”

Section: Design Of Broad Band MMmentioning

confidence: 99%

“…However for many applications it is desirable that either the spectral or angular bandwidth is essentially increased as compared to conventional MMs. The typical examples include X-ray astronomy [1], synchrotron radiation beam steering [2], Göbel optics for increasing the flux from X-ray tubes [3], and EUV lithography [4].…”

Section: Introductionmentioning

confidence: 99%

“…This way radiation of different wavelengths λ or of different angles φ incident onto the MM, according to the Bragg law, are reflected from stacks of layers placed at different depth. Several theoretical approaches were developed to design MM with any desired reflectivity profile R(λ) or R(φ) (see, e.g., [1,2,[5][6][7][8] and references therein). Notice that all approaches result in non-monotonic oscillating variation of the layer thickness with depth, even though the desired profile of the reflectivity curve is very simple (for example, constant).…”

Section: Introductionmentioning

confidence: 99%

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Wideband multilayer mirrors with minimal layer thicknesses variation

Кожевников¹,

Yakshin²,

Bijkerk³

2015

Opt. Express

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Wideband multilayers designed for various applications in hard X-ray to Extreme UV spectral regions are based on a layered system with layer thicknesses varying largely in depth. However, because the internal structure of a thin film depends on its thickness, this will result in multilayers in which material properties such as density, crystallinity, dielectric constant and effective thickness vary from layer to layer. This variation causes the fabricated multilayers to deviate from the model and negatively influences the reflectivity of the multilayers. In this work we solve this problem by developing designs of wideband multilayers with strongly reduced layer thickness variations in depth, without essential degradation of their optical characteristics. 158(1-6), 127-140 (1998). 7. P. van Loevezijn, R. Schlatmann, J. Verhoeven, B. A. van Tiggelen, and E. M. Gullikson, "Numerical and experimental study of disordered multilayers for broadband x-ray reflection," Appl. Opt. 35(19), 3614-3619 (1996). 8. X. Cheng, Z. Wang, Z. Zhang, F. Wang, and L. Chen, "Design of X-ray supermirrors using simulated annealing algorithm," Opt. Commun. 265(1), 197-206 (2006) Ragozin, Zh. Wang, Zh. Zhong, and F. Wang, "Design, fabrication, and study of wideband multilayer x-ray mirrors," Crystallogr. Rep. 51(6), 1075-1081 (2006). 12. R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, W. van der Wiel, P. Hegeman, C. Brons, B.Bastiaens, K. Boller, and F. Bijkerk, "Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range," AIP Adv. 3(1), 012103 (2013). 13. I. V. Kozhevnikov, L. Peverini, and E. Ziegler, "Development of a self-consistent free-form approach for studying the three-dimensional morphology of a thin film," Phys. Rev. B 85(12), 125439 (2012). 14. L. Peverini, E. Ziegler, T. Bigault, and I. Kozhevnikov, "Dynamic scaling of roughness at the early stage of tungsten film growth," Phys. Rev. B 76(4), 045411 (2007).

show abstract

Section: Introductionmentioning

confidence: 84%

“…More accurate choice of the starting guess, as, e.g., in [2], proves to be unnecessary, because the reflectivity bandwidth is only twice of that of a periodic MM.…”

Section: Design Of Broad Band MMmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Wideband multilayer mirrors with minimal layer thicknesses variation

Кожевников¹,

Yakshin²,

Bijkerk³

2015

Opt. Express

View full text Add to dashboard Cite

show abstract

“…Several approaches to obtain such depth-graded structures were considered theoretically, based on numerical optimization [24][25][26][27] or a combination of analytical designing and numerical optimization. [28][29][30][31] In both methods, solving the so-called inverse problem is usually required as the final step, which consists of the minimization of a certain merit function that characterizes the deviation of the calculated reflectivity profile from the desired one. In this procedure, the thicknesses of the layers are considered as variables, and a set of layer thicknesses will be found that provides a sufficiently deep minimum of the merit function used.…”

Section: B Broadband Multilayer Mirrormentioning

confidence: 99%

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant development over the past few years, particularly on controlling the spectral characteristics of light for advanced applications like EUV photolithography, space observation, and accelerator- or lab-based XUV experiments. Both planar and three dimensional multilayer structures have been developed to tailor the spectral response in a wide wavelength range. For the planar multilayer optics, different layered schemes are explored. Stacks of periodic multilayers and capping layers are demonstrated to achieve multi-channel reflection or suppression of the reflective properties. Aperiodic multilayer structures enable broadband reflection both in angles and wavelengths, with the possibility of polarization control. The broad wavelength band multilayer is also used to shape attosecond pulses for the study of ultrafast phenomena. Narrowband multilayer monochromators are delivered to bridge the resolution gap between crystals and regular multilayers. High spectral purity multilayers with innovated anti-reflection structures are shown to select spectrally clean XUV radiation from broadband X-ray sources, especially the plasma sources for EUV lithography. Significant progress is also made in the three dimensional multilayer optics, i.e., combining micro- and nanostructures with multilayers, in order to provide new freedom to tune the spectral response. Several kinds of multilayer gratings, including multilayer coated gratings, sliced multilayer gratings, and lamellar multilayer gratings are being pursued for high resolution and high efficiency XUV spectrometers/monochromators, with their advantages and disadvantages, respectively. Multilayer diffraction optics are also developed for spectral purity enhancement. New structures like gratings, zone plates, and pyramids that obtain full suppression of the unwanted radiation and high XUV reflectance are reviewed. Based on the present achievement of the spectral tailoring multilayer optics, the remaining challenges and opportunities for future researches are discussed.

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Multilayer Optics for Synchrotron Applications

Singhapong,

Bowen,

Wang

et al. 2024

Adv Materials Technologies

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X‐ray multilayer optics play a vital role in synchrotron optics due to their ability to generate constructive interference. These devices typically consist of several tens to hundreds of periods of alternating layers coated on a substrate. In contrast to single‐layer mirrors that reflect X‐rays within a specific energy range, multilayer optics can be tailored to achieve a high reflection over a broad energy spectrum. This is a sought‐after property for many beamlines and has led to the development of numerous new X‐ray applications and capabilities. This review highlights advances in multilayer optics, including fabrication techniques, layer structure design, material choice, and strategies to enhance performance. This is placed in the context of recent applications of such multilayers as monochromator and gratings, focusing devices, and polarizers. Current challenges and the future outlook within this field are also proposed. This comprehensive summary of a rapidly advancing field highlights recent achievements and is intended to promote practical applications in terms of the use of multilayer synchrotron optics.

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Design of X-ray supermirrors

Cited by 99 publications

References 31 publications

Wideband multilayer mirrors with minimal layer thicknesses variation

Wideband multilayer mirrors with minimal layer thicknesses variation

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Multilayer Optics for Synchrotron Applications

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