Design of Wafer Level Device Irradiation and The Parameters Extraction Equipment Based on X-ray Irradiation

Ming-zhu, 荀明珠 Xun; Yu-dong, 李豫东 Li; Qi, 郭旗 Guo; Cheng-fa, 何承发 He; Xin, 于 新 Yu; Gang, 于 钢 Yu; Lin, 文 林 Wen; Xin-yao, 张兴尧 Zhang

doi:10.3788/fgxb20173806.0828

发光学报

2017

DOI: 10.3788/fgxb20173806.0828

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Design of Wafer Level Device Irradiation and The Parameters Extraction Equipment Based on X-ray Irradiation

荀明珠 Xun Ming-zhu¹,

李豫东 Li Yu-dong²,

郭旗 Guo Qi³

et al.

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Design of Wafer Level Device Irradiation and The Parameters Extraction Equipment Based on X-ray Irradiation

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