2014
DOI: 10.1007/s00542-014-2078-y
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Design of silicon micro-resonators with low mechanical and optical losses for quantum optics experiments

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Cited by 9 publications
(7 citation statements)
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“…For the measurements at intermediate mass we have used a silicon wheel oscillator, made on the 70-μm thick device layer of an Silicon-On-Insulator wafer and composed of a central disk kept by structured beams 27 , balanced by four counterweights on the beams joints that so become nodal points ( Fig. 1b ) 28 . On the surface of the central disk, a multilayer SiO 2 /Ta 2 O 5 dielectric coating forms an high reflectivity mirror.…”
Section: Resultsmentioning
confidence: 99%
“…For the measurements at intermediate mass we have used a silicon wheel oscillator, made on the 70-μm thick device layer of an Silicon-On-Insulator wafer and composed of a central disk kept by structured beams 27 , balanced by four counterweights on the beams joints that so become nodal points ( Fig. 1b ) 28 . On the surface of the central disk, a multilayer SiO 2 /Ta 2 O 5 dielectric coating forms an high reflectivity mirror.…”
Section: Resultsmentioning
confidence: 99%
“…Our silicon oscillator is made on the 70 µm thick device layer of a SOI wafer [26] and is composed of a central mass kept by structured beams [27], balanced by four counterweights on the beams joints [28]. On the surface of the central disk, a multilayer SiO 2 /Ta 2 O 5 dielectric coating forms a high reflectivity mirror.…”
mentioning
confidence: 99%
“…The drum modes have eigenfrequencies starting from ∼200 kHz and masses of the order of 10 −10 kg. The silicon frame is suspended with alternating flexural and torsional springs, forming an on-chip "loss shield" structure [50] that allows to achieve a mechanical quality factor Q around 10 7 for most of the drum modes. More information about the design, fabrication and the characteristics of the device can be found in the works by Borrielli et al [51] and Serra et al [52,53].…”
Section: Status Of the Experimentsmentioning
confidence: 99%