Design of Scanning System for Mechanoscopic Analysis

Abstract

The work deals with hardware and software proposal of a system suitable for control and visualization of scanning process based on resistivity measurement. Three axis positioning system with conductive contact probe is utilized. The user application was created in MATLAB programming environment. Important part of the design represents the definition of requirements, choice of the appropriate tools, functions and structures needed for reliable realization. Proposed user application allows setting key parameters of the measurement, appropriate method of data acquisition as well as performing online 3D visualization of measured data. The functionality of the application is verified via measurement of a several selected samples. Results of these measurements are also presented.