2003
DOI: 10.1061/(asce)0893-1321(2003)16:3(108)
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Design of Piezoresistive MEMS-Based Accelerometer for Integration with Wireless Sensing Unit for Structural Monitoring

Abstract: Abstract:The use of advanced embedded system technologies such as microelectromechanical system (MEMS) sensors and wireless communications hold great promise for measuring the response of civil structures to ambient and external disturbances. In this paper, the design of a high-performance planar piezoresistive MEMS accelerometer is discussed in detail. The piezoresistive accelerometer possesses superior performance characteristics including low noise densities when measuring local structural responses charact… Show more

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Cited by 107 publications
(59 citation statements)
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“…The axial displacement can be obtained by solving (1) taking into account the boundary conditions given by (3). By integrating (1), one gets …”
Section: Displacement Analysis and Natural Frequency Modelmentioning
confidence: 99%
See 1 more Smart Citation
“…The axial displacement can be obtained by solving (1) taking into account the boundary conditions given by (3). By integrating (1), one gets …”
Section: Displacement Analysis and Natural Frequency Modelmentioning
confidence: 99%
“…MEMS accelerometers have been used nowadays for SHM in the place of conventional accelerometers due to their smaller sizes and lower costs [3][4][5][6]. Accelerometers used in these applications can employ one of several methods such as capacitive, piezoresistive, and piezoelectric.…”
Section: Introductionmentioning
confidence: 99%
“…The components that do need occasional attention or even replacement are hangers (suspenders) and bearings and these make good cases for applying SHM sys-tems and technology. Hanger monitoring is an ideal application for low cost autonomous wireless vibration sensors [21] as there are many cases of excessive oscillation and corrosion or failure of anchorages, while the performance of deck bearings has been shown in Humber and the two suspension bridges over the Bosporus to have strong effect on the character of fundamental vertical vibration modes.…”
Section: Humber Bridge Monitoring For Simulation Validationmentioning
confidence: 99%
“…The information from sensors is usually sent by cables to data acquisition system. It increases the cost of installation and maintenance [5][6][7]. In case of large buildings such as bridges, the cost of additional cable installation is high.…”
Section: Introductionmentioning
confidence: 99%