Design of Piezoelectric Cantilever Microphone and Its MEMS- Acoustical Circuit for Hearing Aid Devices

Abstract

A micromachined piezoelectric cantilever transducer, which works as a microphone has been designed. The 1800 x 1800 x 2.9wn3 cantilever has a lead zirconate titnate (PZT) piezoelectric thin film sandwiched between two Aluminum electrodes on a supporting layer of silicon nitride. The static analysis of piezoelectric cantilever is typically performed, which describes the deflection of a generic m-layer piezoelectric multitnorph, and acoustic modeling of the microphone has been described. The maximum deflection at the tip of the cantilever is 22,pm , and the maximum difference output voltage between two electrodes is 0. Im V

Asymmetric electrode design for significant performance enhancement of piezoelectric P(VDF-TrFE) polymer microcantilevers

“…The piezoelectric MEMS cantilevers in the literature consist of piezoelectric thin films with either inter-digitated electrodes [12,13] or top/bottom electrodes [14][15][16]. A commonly found configuration is the bimorph, which consists of two piezoelectric materials operating in opposite strain with an applied voltage to produce amplified flexural bending of the cantilever, or conversely as a bending-mode sensor.…”