Design of photonic microcavities in hexagonal boron nitride

Kim, Sejeong; Toth, Milos; Aharonovich, Igor

doi:10.3762/bjnano.9.12

Cited by 10 publications

(8 citation statements)

References 41 publications

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“…1e . The geometries of the PCCs presented here were designed to have resonances in the visible spectral range 35 , where hBN quantum emitters are typically observed. To achieve the desired resonances, we used a lattice constant ( a ) in the range of 240–300 nm, with an air hole radius in the photonic mirror region of 0.33 a and two air holes at the end of the line defects with 0.22 a , shifted outwards by 0.22 a .…”

Section: Resultsmentioning

confidence: 99%

Photonic crystal cavities from hexagonal boron nitride

et al. 2018

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Development of scalable quantum photonic technologies requires on-chip integration of photonic components. Recently, hexagonal boron nitride (hBN) has emerged as a promising platform, following reports of hyperbolic phonon-polaritons and optically stable, ultra-bright quantum emitters. However, exploitation of hBN in scalable, on-chip nanophotonic circuits and cavity quantum electrodynamics (QED) experiments requires robust techniques for the fabrication of high-quality optical resonators. In this letter, we design and engineer suspended photonic crystal cavities from hBN and demonstrate quality (Q) factors in excess of 2000. Subsequently, we show deterministic, iterative tuning of individual cavities by direct-write EBIE without significant degradation of the Q-factor. The demonstration of tunable cavities made from hBN is an unprecedented advance in nanophotonics based on van der Waals materials. Our results and hBN processing methods open up promising avenues for solid-state systems with applications in integrated quantum photonics, polaritonics and cavity QED experiments.

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Section: Resultsmentioning

confidence: 99%

Photonic crystal cavities from hexagonal boron nitride

et al. 2018

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“…Initial results on integration of SPEs from other layered materials such as WSe2 have been demonstrated by integrating them into 1D silicon nitride cavities or open cavities [18][19] . On the other hand, hBN can be used in an entirely monolithic approach where the devices are fabricated from the parent material that hosts SPEs [20][21][22] . The monolithic approach is advantageous in that emitters can be located within the high energy field of the cavities, and can therefore be positioned in the maxima of optical modes, thus enabling the realisation of optimal coupling efficiencies as previously done for diamond, GaAs, and SiC [23][24][25][26] .…”

Section: Introductionmentioning

confidence: 99%

Photonic Nanostructures from Hexagonal Boron Nitride

Fröch

Hwang

Kim

et al. 2018

Advanced Optical Materials

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demonstrated by integrating them into 1D silicon nitride cavities or open cavities. [17,18] On the other hand, hBN can be used in an entirely monolithic approach where the devices are fabricated from the parent material that hosts SPEs. [19,20] The monolithic approach is advantageous in that emitters can be located within the high-energy field of the cavities, and can therefore be positioned in the maxima of optical modes, thus enabling the realisation of optimal coupling efficiencies as previously done for diamond, GaAs, and SiC. [21][22][23][24] This in combination with recent reports on the tunability of the SPE emission wavelength will allow to directly tune emitters to the resonant modes of devices, [25] in order to reversibly investigate effects such as Purcell enhancement from hBN SPEs.In this work, we report detailed nanofabrication protocols used to realize photonic resonators from hBN. In particular, we demonstrate microring cavities and 1D photonic crystals that exhibit high-quality factors (Q) of ≈1500. We also discuss in detail the shortcomings and benefits of a hybrid reactive ion etching-electron beam induced etching (RIE-EBIE) process that is suitable for the fabrication of large-area, suspended, and supported device structures that are made from hBN, and contain nanoscale features and highly vertical sidewalls. The nanofabrication approach presented here is suitable for other layered materials, and therefore broadly relevant to the field of photonics, as well as polaritonic, nanoelectromechanical, optoelectronic, and optomechanic systems, [26] all of which require engineering of structures with nanoscale precision. Results and DiscussionThe fabrication process is outlined schematically in Figure 1. First, hBN flakes are transferred onto a silicon or a silicon dioxide substrate via mechanical exfoliation using sticky tape (Figure 1a). hBN has the advantage that it can be exfoliated from a larger parent crystal, to flakes that are chemically and mechanically stable/robust, with thicknesses as small as a single monolayer. Therefore, it does not require cumbersome preparation steps that are often necessary for classical bulk counterparts such as diamond and SiC. The substrate was prepatterned with trenches that are ≈5 µm deep to allow for a sufficient air gap below the suspended hBN structures. After hBN transfer (Figure 1b), residues and contaminants from the sticky tape were removed by calcination in air on a hot plate at 500 °C and subsequent annealing in Argon at 850 °C, which also increases adhesion of hBN flakes to substrates. An optical image of a suspended flake before the subsequent processing steps is shown in Figure 1c.Growing interest in devices based on layered van der Waals (vdW) materials is motivating the development of new nanofabrication methods. Hexagonal boron nitride (hBN) is one of the most promising materials for studies of quantum photonics and phonon polaritonics. A promising nanofabrication process used to fabricate several hBN photonic devices using a hybrid reactive ion et...

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“…Contemporarily, the enhancement without coupling to plasmonic nanoparticles was made feasible using photonic crystal cavities 143 and microcavities 144 , which enhances the implementation of scaled quantum photonic circuits. As similar to stark tuning of emission in hBN and graphene heterostructure, efficient spontaneous emission and enhancing photon extraction was realized through graphene-hBN hyperstructure 148 .…”

Section: Prediction Of Emitter Defect Structures and Applications Of Quantum Emittersmentioning

confidence: 99%

Optical quantum technologies with hexagonal boron nitride single photon sources

Shaik

2021

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Single photon quantum emitters are important building blocks of optical quantum technologies. Hexagonal boron nitride (hBN), an atomically thin wide band gap two dimensional material, hosts robust, optically active luminescent point defects, which are known to reduce phonon lifetimes, promises as a stable single-photon source at room temperature. In this Review, we present the recent advances in hBN quantum light emission, comparisons with other 2D material based quantum sources and analyze the performance of hBN quantum emitters. We also discuss state-of-the-art stable single photon emitter’s fabrication in UV, visible and near IR regions, their activation, characterization techniques, photostability towards a wide range of operating temperatures and harsh environments, Density-functional theory predictions of possible hBN defect structures for single photon emission in UV to IR regions and applications of single photon sources in quantum communication and quantum photonic circuits with associated potential obstacles.

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Design of photonic microcavities in hexagonal boron nitride

Cited by 10 publications

References 41 publications

Photonic crystal cavities from hexagonal boron nitride

Photonic crystal cavities from hexagonal boron nitride

Photonic Nanostructures from Hexagonal Boron Nitride

Optical quantum technologies with hexagonal boron nitride single photon sources

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