Design of optical path and mechanical structure for non-contact confocal scanning imaging system

Abstract

This paper designs a non-contact laser confocal system and its mechanical structure. A relatively simple optical structure was sought to be used while ensuring that the design specifications were accomplished. The article designed the lens set and analyzed its imaging quality using Zemax software. The results show that the focusing dispersion spot diameter of the microfocusing system is less than 3 μm, and the RMS radius is less than 1 μm; the focusing dispersion spot diameter of the detection and acquisition system is less than 15 μm, and the RMS radius is less than 5 μm; and the MTF curves of all subsystems are close to the diffraction limit, which indicates that the optical transmission quality is good. In addition, the mechanical structure of the optical path system is designed in this paper to ensure the compactness and simplicity of the whole system.Finally, it can be seen from the physical experiment and software simulation that the designed confocal optical path system has good optical imaging performance