Design of online damage images detection system for large-aperture mirrors of high power laser facility based on wavefront coding technology

Wang, Fang; Liu, Qinxiao; D, Hu; Liu, Hongjie; Zheng, Tianran

doi:10.1016/j.net.2021.03.015

Cited by 1 publication

(1 citation statement)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Ultra-precision optical components play key roles in high-power laser devices [1,2] . However, the surface and subsurface defects of optical components would cause local energy deposition, transformation and release, which leads to cracking or failure of optical components [3] . Thus, defect has become the bottleneck factor for higher laser damage threshold of optical systems.…”

Section: Introductionmentioning

confidence: 99%

Defect detection of precision optics by bright-dark-field structured illumination microscopy

Zhang

Liu

2023

Conference on Infrared, Millimeter, Terahertz Waves and Applications (IMT2022)

View full text Add to dashboard Cite

Defect has become the bottleneck that limits the further increase of energy output in high-power laser devices, accurate defect detection is important for defect evaluation and optical component quality control. The bright-field methods have the problem that the illumination background light affects the measurement sensitivity. The dark-field measurement methods can remove the illumination background light, and the defect detection sensitivity is higher. However, the surface shape information is also removed out, thus the defect depth information is missing. In addition, the axial resolution of defect detection under regular illumination is rather low due to the influence of out-of-focus light. In this paper, a defect detection method based on bright-dark-field structured illumination microscopy (BDSIM) is proposed. This method takes the advantage of the high axial resolution of structured illumination, reconstructs the surface shape by bright-field configuration, and detects the surface and subsurface defect by dark-field configuration. Experiments prove that our method can effectively measure the surface and subsurface defects with accurate depth information.

show abstract

Section: Introductionmentioning

confidence: 99%