Design of on‐chip resonator using distributed capacitors in 0.13‐μm (Bi)‐CMOS technology

Abstract

A novel methodology for on-chip resonator design using broadside-coupled distributed capacitors is presented in this work. Using this method, a resonance can be generated at any specified frequency by changing the physical dimensions of the distributed capacitors. To prove the concept of the proposed method is feasible in practice, a resonator is designed and fabricated in a standard 0.13-μm CMOS technology. The measured results show that a resonance can be generated at approximately 47 GHz. The chip size, excluding the pads, is only 0.176 × 0.149 mm 2 .