Design of novel compact anti-stiction and low insertion loss RF MEMS switch

Bansal, Deepak; Kumar, Amit; Sharma, Akshdeep; Kumar, Prem; Rangra, Kamaljit

doi:10.1007/s00542-013-1812-1

Cited by 49 publications

(21 citation statements)

References 15 publications

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“…Actuation Voltage of the proposed switch is found to be 14.14 V which is much less than 20 V and 30 V required in [17] and [16]; thus making the switch suitable for Low power applications (Satellite Communications) where the power conservation is the prime concern.…”

Section: Actuation Voltagementioning

confidence: 93%

“…In the proposed switch, the length of the beam is 300 μm and vertical movement required for the operation is just 3 μm, which is marginal in comparison to the length of the beam. Hence, stress on the beam will be minimal; which makes the switch more durable as compared to conventional ones [16,17].…”

Section: Reliability Analysismentioning

confidence: 99%

“…Proposed design is similar to this switch in terms of membrane design. Rangra et al [17] proposed an anti stiction switch and showed excellent performance over a short range of bandwidth. The proposed design comparison is given in the Table with above mentioned two switches.…”

Section: Comparisonmentioning

confidence: 99%

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A Disparate Low Loss DC to 90 GHz Wideband Series Switch

Gogna¹,

Jha²,

Gaba³

et al. 2016

Transactions on Electrical and Electronic Materials

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This paper presents design and simulation of wide band RF microswitch that uses electrostatic actuation for its operation. RF MEMS devices exhibit superior high frequency performance in comparison to conventional devices. Similar techniques that are used in Very Large Scale Integration (VLSI) can be employed to design and fabricate MEMS devices and traditional batch-processing methods can be used for its manufacturing. The proposed switch presents a novel design approach to handle reliability concerns in MEMS switches like dielectric charging effect, micro welding and stiction. The shape has been optimized at actuation voltage of 14-16 V. The switch has an improved restoring force of 20.8 μN. The design of the proposed switch is very elemental and primarily composed of electrostatic actuator, a bridge membrane and coplanar waveguide which are suspended over the substrate. The simple design of the switch makes it easy for fabrication. Typical insertion and isolation of the switch at 1 GHz is -0.03 dB and -71 dB and at 85 GHz it is -0.24 dB and -29.8 dB respectively. The isolation remains more than -20 db even after 120 GHz. To our knowledge this is the first demonstration of a metal contact switch that shows such a high and sustained isolation and performance at W-band frequencies with an excellent figure-of merit (fc=1/2.pi.Ron.Cu =1,900 GHz). This figure of merit is significantly greater than electronic switching devices. The switch would find extensive application in wideband operations and areas where reliability is a major concern.

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Section: Actuation Voltagementioning

confidence: 93%

Section: Reliability Analysismentioning

confidence: 99%

See 1 more Smart Citation

A Disparate Low Loss DC to 90 GHz Wideband Series Switch

Gogna¹,

Jha²,

Gaba³

et al. 2016

Transactions on Electrical and Electronic Materials

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“…Employing the symbol-level analog precoders, however, can become inappropriate in many scenarios, such as ultra-low latency applications of 5G networks having symbol duration requirement of few microseconds [20]. In such cases, the symbol-level analog precoding can cause drastic performance degradation in hybrid precoding systems with inexpensive PSs having the transient response time in the order of microseconds (e.g., PSs comprising RF MEMS [40]). To overcome this shortcoming, we propose the blocklevel analog precoding, where an analog precoder matrix that is suitable for a block of T symbol-intervals is designed.…”

Section: Block-level Analog Precodingmentioning

confidence: 99%

Interference Exploitation-Based Hybrid Precoding With Robustness Against Phase Errors

Hegde

Masouros

Pesavento

2019

IEEE Trans. Wireless Commun.

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Hybrid analog-digital precoding significantly reduces the hardware costs in massive MIMO transceivers when compared to fully-digital precoding at the expense of increased transmit power. In order to mitigate the above shortfall, we use the concept of constructive interference-based precoding, which has been shown to offer significant transmit power savings when compared with the conventional interference suppression-based precoding in fully-digital multiuser MIMO systems. Moreover, in order to circumvent the potential quality-of-service degradation at the users due to the hardware impairments in the transmitters, we judiciously incorporate robustness against such vulnerabilities in the precoder design. Since the undertaken constructive interference-based robust hybrid precoding problem is nonconvex with infinite constraints and thus difficult to solve optimally, we decompose the problem into two subtasks, namely, analog precoding and digital precoding. In this paper, we propose an algorithm to compute the optimal constructive interference-based robust digital precoders. Furthermore, we devise a scheme to facilitate the implementation of the proposed algorithm in a lowcomplexity and distributed manner. We also discuss block-level analog precoding techniques. Simulation results demonstrate the superiority of the proposed algorithm and its implementation scheme over the state-of-the-art methods.Index Terms-Symbol-level hybrid precoding, Constructive interference, Massive MIMO, Semi-infinite optimization problem, Iterative parallel method.

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“…Their scale in combination with enhanced performance over their conventional counter parts has kept up the interest of MEMS research over the past decade. In particular, capacitive RF MEMS switches offer high isolation along with low power consumption making them one of the most promising devices in RF applications [2].…”

Section: Introductionmentioning

confidence: 99%

Modelling of the dynamical behaviour of floating electrode MEMS

Giounanlis

Blokhina

Feely

et al. 2015

2015 IEEE International Symposium on Circuits and Systems (ISCAS)

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In this work we investigate the dynamics of a floating electrode microelectromechanical (MEMS) switch. This is a type of very common MEMS that are actuated elecrtrostatically, i.e., by applying a voltage across the micromechanical structure. A floating electrode MEMS is a novel modification of a capacitive switch where a thin metal layer is deposited on top of the isolating dielectric layer. Although these devices have promising characteristics, this modification alters their behaviour in comparison with conventional MEMS switches. We develop a multi-physics model to simulate the behaviour of the switch and model a number of physical effects that occur in the system and influence its dynamics. We used a fractal as representation of the electrode surface to model the field emission as a result of a local enhancement of the electric field. We provide the comparison of the simulated behaviour with experimental results.

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Design of novel compact anti-stiction and low insertion loss RF MEMS switch

Cited by 49 publications

References 15 publications

A Disparate Low Loss DC to 90 GHz Wideband Series Switch

A Disparate Low Loss DC to 90 GHz Wideband Series Switch

Interference Exploitation-Based Hybrid Precoding With Robustness Against Phase Errors

Modelling of the dynamical behaviour of floating electrode MEMS

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