Based on avalanche effect of avalanche transistor, Marx circuit configuration is adopted, trigger circuit and PCB layout are described in detail. The all-solid-state pulse source is designed with 10-stages Marx circuit. The test results demonstrate that its output impedance is 50Ω, the pulse width is 10ns approximately, pulse voltage is about 1.5kV,the rise time of the positive pulse is less than 2ns, the fall time of negative pulse is about 3ns, the operating frequency is 10kHz, coefficient of variation for voltage peak, fall time and pulse width is less than 5%, which is suitalbe as interference source for the EMC experiment.