Chip-scale infrared spectrometers consisting of a microring
resonator
array (MRA) were developed for volatile organic compound (VOC) detection.
The MRA is serially positioned to serve as a wavelength sorting element
that enables wavelength demultiplexing. Unlike conventional devices
operated by a single microring, our MRA can perform multiwavelength
mid-infrared (mid-IR) sensing by routing the resonant wavelength light
from a broadband mid-IR source into different sensing channels. Miniaturized
spectrometer devices were fabricated on mid-IR transparent silicon-rich
silicon nitride (SiN
x
) thin films through
complementary metal–oxide-semiconductor (CMOS) processes, thus
enabling wafer-level manufacturing and packaging. The spectral distribution
of the resonance lines and the optimization of the microring structures
were designed using finite-difference time-domain (FDTD) modeling
and then verified by laser spectrum scanning. Using small microring
structures, the spectrum showed a large free spectral range (FSR)
of 100 nm and held four spectral channels without crosstalk. Unlike
near-infrared microrings using refractive index sensing, our MRA can
detect hexane and ethanol vapor pulses by monitoring the intensity
variation at their characteristic mid-IR absorption bands, thus providing
high specificity. Applying multiwavelength detection, the sensor module
can discriminate among various VOC vapors. Hence, our mid-IR MRA could
be an essential component to achieve a compact spectroscopic sensing
module that has the potential for applications such as remote environmental
monitoring and portable health care devices.