Design of micromirror actuator by ionic polymer metal composites

Abstract

Microactuators for micromirror system have found many applications in various areas including projection displays, optical switches, RF switches and so on. In this paper we demonstrated micromirror actuator using ionic polymer metal composites (IPMC) that is a suitable candidate, since it has many attractive qualities such as durability, aquatic, miniature and light-weighted. Specially, IPMC has extraordinary advantages which are simple bending motion for low driving voltage (1-2 V), low power consumption, and simple structure. The IPMC actuator is made of Nafion NE-1110 (Dupont Co, Ltd., 260 lm thick) layer and electrode (platinum) layers and driven by 1-4 V. The displacement measured vertically is 0.25 mm and tilting angle is 11.3°. The angular motion, which is more than 10°, is a good advantage in the field of display module. This paper shows that the IPMC actuator has enough possibility for other applications.

Aided manufacturing techniques and applications in optics and manipulation for ionic polymer-metal composites as soft sensors and actuators

“…The generative force of the actuator is measured and demonstrated to be sufficient to lift the rigid tip of the scanning fiber endoscope. In addition, Yun et al [53] demonstrated a micromirror actuator using IPMCs. To improve the tip force, two ring type beams were designed and driven, respectively ( Figure 8 h).…”

“…The imaginative manipulator is shown in Figure 9 A, which consists of a terminal gripper and an active catheter capable of performing multi-DOF motion. In this aspect, several researchers have developed [53] ; (c) the multifinger configurations by solution casting method [72] ; (d) a pincher [96] ; (e) a tube-IPMC actuator with four electrodes [97] ; (f) a cylindrical IPMC actuator with four interdigitated electrodes [98] ; (g) an IPMC-embedded active tube [99] ; (h) a rod IPMC actuator [100] ; (i) a novel three-dimensional manipulator [101] ; (j) a sensing-actuating integrated IPMC manipulator [102] ; (k) a bionic human microfinger [96] ; (l) a compliant IPMC microgripper for peg-in-hole assembly [103] ; (m) an aided heart configuration [104] . Reproduced with permission from SPIE [72,99] , ASME [98] , IEEE [97,100] , Wiley [101] , IOPscience [102] , Springer [53] , Intech [96] , National Institute of Science Communication and Information Resources [103] [72, 94 -98, 100 -127] .…”

“…By directing the output of a high-power laser controlled by computer, the electrodes together with intercalated polymers of IPMCs will be cut, which either melt, burn and vaporize away, or are blown away by a jet of gas, leaving an edge with a high-quality surface. In order to meet precisely the desired size and shape, Yun et al [53] designed a micromirror actuator by laser processing. IPMCs with standard thickness of 260 μ m were successfully fabricated using a UV laser micromachining system that can minimize laser spot size up to 30 μ m. The cutting line is uniform with the width of 100 μ m as shown in Figure 2 B.…”

“…When a bias voltage is applied on the three fixed areas of the IPMCs, the surface of the free circular mirror begins to deform. Feng and Tsai et al [87,88] reported a microendoscopic ocular surgery assistant device, which employed the developed four-electrode [78] ; (B) tilting actuator for endoscope [80] ; (a) layout of IPMC actuator incorporated into compact camera module [78] ; (b) structure of variable-focal length lens [83] ; (c) the structure of four IPMC actuators [80] ; (d) prototype AF actuator of IPMC [85] ; (e) designed structure of AF lens actuator [79] ; (f) experimental demonstration of the new deformable mirror [94] ; (g) prototype of light beam steering [86] ; (h) micromirror actuator using IPMCs [53] ; (i) scanning fiber endoscope using IPMCs [91] ; (j) illustration of the micromachined optical fiber enclosed fourelectrode IPMC actuator for biomedical applications [87] ; (k) petal-like IPMC gel lens actuator [86] . Reproduced with permission from SPIE [78 -80] , ASME [83] , Springer [53,85,88] IPMC actuator to move the laser beam in multiple directions ( Figure 8 j).…”

“…Cutting methods and the cross section morphology: (A) mechanical cutting; (B) laser processing[53] . Reproduced with permission from SPIE.Brought to you by | University of Queensland -UQ Library Authenticated Download Date | 7/15/15 8:24 PM…”