Design of micromachines under uncertainty with the sample-average approximation method
Jorge Mario MONSALVE GUARACAO,
Sergiu LANGA,
Michael STOLZ
et al.
Abstract:Variability in the features produced by microfabrication processes, as well as uncertainty in some material properties, may cause a significant deviation in the performance of micromachines within the same fabrication run. Based on an estimation of the expected process variations, the design of such devices can be optimised to achieve the design goals, even under this uncertainty. Learning from previous works on the design of microresonators, we formulate this design problem as a case of chance-constrained opt… Show more
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