Design of Microfabricated Mechanically Interlocking Metamaterials for Reworkable Heterogeneous Integration

Abstract

Next–generation interconnects utilizing mechanically interlocking structures enable permanent and reworkable joints between microelectronic devices. Mechanical metamaterials, specifically dry adhesives, are an active area of research which allows for the joining of objects without traditional fasteners or adhesives, and in the case of chip integration, without solder. This paper focuses on reworkable joints that enable chips to be removed from their substrates to support reusable device prototyping and packaging, creating the possibility for eventual pick-and-place mechanical bonding of chips with no additional bonding steps required. Analytical models are presented and are verified through Finite Element Analysis (FEA) assuming pure elastic behavior. Sliding contact conditions in FEA simplify consideration of several design variations but contribute ~10% uncertainty relative to experiment, analysis, and point-loaded FEA. Two designs are presented; arrays of flat cantilevers have a bond strength of 6.3 kPa, and non-flat cantilevers have a strength of 29 kPa. Interlocking designs present self-aligning in-plane forces that emerge from translational perturbation from perfect alignment. Stresses exceeding the material yield stress during adhesion operations present a greater concern for repeatable operation of compliant interlocking joints and will require further study quantifying and accommodating plastic deformation. Designs joining a rigid array with a complementary compliant cantilever array preserve the condition of reworkability for the surface presenting the rigid array. Eventual realization of interconnect technology based on this study will provide a great improvement of functionality and adaptability in heterogeneous integration and microdevice packaging.