Abstract:Micro-electromechanical systems (MEMS) have dominated the interests of the industry due to its microminiaturization and high frequency for the past few decades. With the rapid development of various radio frequency (RF) systems, such as 5G mobile telecommunications, satellite, and other wireless communication, this research has focused on a high frequency resonator with high quality. However, the resonator based on an inverse piezoelectric effect has met with a bottleneck in high frequency because of the low q… Show more
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