“…Achievement of high performance multizone temperature control is very important in a range of commercial and industrial applications. For instance, recent work in this area includes distributed control of thermal processes (Jones et al, 2003;Zaheer-uddin et al, 1993;Emami-Naeini et al, 2003;Demetriou et al, 2003;Ross, 2004), and semiconductor processing (Alaeddine and Doumanidis, 2004a, b;Schaper et al, 1999b). Particularly relevant to our work is the study in EmamiNaeini et al (2003), where the authors use multivariable distributed control in order to maintain a uniform temperature across a wafer during ramp-up (similar to the control objective we study here).…”