Design of convoluted wire antennas using a genetic algorithm

Scatterometry is a novel optical metrology that has received considerable attention in the silicon industry in the past few years. Based on the analysis of light scattered from a periodic sample, scatterometry technology can be thought of as consisting of two parts known as the forward problem and the inverse problem. In the forward problem, a scatterometer "signature" is measured. The signature is simply the measured optical response of the scattering features to some incident illumination, like laser light. In the inverse problem, the signature is analyzed in order to determine the parameters (such as linewidth, thickness, profile, etc) of the scattering features. Typically a rigorous electrodynamic model is used in the solution to the inverse problem, but due to the complexity of the model there is no direct analytic solution. Instead, a variety of numerical methods to solve the inverse problem have been proposed and utilized.The earliest widely used method of solution to the inverse problem involved the generation of a "library" of scatter signatures corresponding to discrete parameter combinations of the structure being measured. Once the library was generated, it was then searched in order to determine the best match to the measured signature. The parameters of the best match were then reported as the parameters of the measured signature. As the technology matured, other methods such as model optimization techniques also emerged. In fact, a variety of alternate techniques have been explored and reported, but a general study comparing the results (and hence the strengths and weaknesses) of the various techniques has yet to be performed.In this research, we shall report results from using several different solutions to the inverse problem on two applications (patterned resist and etched poly). The solution methods shall include the classic library search method as well as three common optimization methods. The results will show that each technique has strengths and weaknesses. For example, the library search methods are generally the most robust but also the most time consuming, and the optimization methods, while fast, are prone to reporting a local but not global minima.

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“…A good introductory book has been written by Goldberg 18 . Chuprin has used GA for the design of finite element antennas [19][20] .…”

Section: Genetic Algorithmmentioning

confidence: 99%

Comparison of solutions to the scatterometry inverse problem

Raymond

Littau

Chuprin³

et al. 2004

Metrology, Inspection, and Process Control for Microlithography XVIII

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“…Reference [19] uses NSGA-II to optimize the magnet shape, rotor yoke, and stator slot of an 8-pole 48-slot IPMSM and creatively introduces the Nelder-Mead method to solve the geometric constraint repair problem, achieving the maximum motor torque and minimal torque ripple. Reference [20] uses a genetic algorithm to perform multiobjective optimization design on the rotor structure of permanent-magnet synchronous motors, with the optimization objectives of the slotting torque, torque ripple, harmonic distortion rate of the air gap magnetic flux density, and the amplitude of the no-load back electromotive force.…”

Section: Introductionmentioning

confidence: 99%

Optimal Design of Marine Motors for Joint Efficiency and Economic Optimization

et al. 2023

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The permanent magnet synchronous motor (PMSM) has been widely used in the field of ship electric propulsion due to its advantages of a small size, light weight, low loss, and high efficiency. In this paper, a 100 kW ship-side thruster motor was taken as the research object, and the problem of the high harmonic content of the air gap magnetic flux density in the motor was addressed by designing a rotor eccentricity. On this basis, the hybrid Taguchi method of genetic algorithm was used to optimize the rotor structural parameters with increasing the efficiency and reducting the cost of the motor as the optimization objectives. The results show that the performance and economy of the motor have been greatly improved after optimization. Finally, the motor weight reduction hole was designed, and a prototype was manufactured and tested. The test data are within the allowable range compared with the simulation data, verifying the effectiveness of the multiobjective optimization algorithm proposed in this paper.

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“…On the other hand, a novel approach for improving frequency responses of passive high‐frequency components with nonintuitive shapes has been recently developed . In this technique, an area of a passive high‐frequency component is divided into many rectangular pixels, and the presence or absence of each pixel is determined by genetic algorithm (GA).…”

Section: Introductionmentioning

confidence: 99%

“…In this technique, an area of a passive high‐frequency component is divided into many rectangular pixels, and the presence or absence of each pixel is determined by genetic algorithm (GA). A few examples of the application of this technique can be found in designing different types of planar antennas such as nonconventional wire‐based , multi‐band patch‐based , and planar monopole‐based antennas.…”

Section: Introductionmentioning

confidence: 99%

Band-pass filter design using modified CSRR-DGS

Bod

Mallahzadeh

2014

Int J RF and Microwave Comp Aid Eng

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In this article, a novel compact band‐pass filter (BPF) with sharp cutoffs and a wide stop‐band is presented. The BPF is basically designed by cutting a modified complementary split‐ring resonator (CSRR) from the ground of two separated microstrip feed lines and has a 71% fractional bandwidth from 4.1 to 9 GHz. Because of the high insertion loss, the designed filter should be packed in a metallic cavity that has undesirable resonances in the stop‐band of the BPF. For eliminating cavity resonances, an evolutionary optimization technique based on changing the pixels of the CSRR defected ground structure is used. A prototype of the final structure obtained from the optimization technique is fabricated. The measurement results show that the optimized filter have a pass band from 4 to 8 GHz with a rejection better than 15 dB from 4 to 15 GHz. The designed filters have compact dimensions of 12 × 12 × 0.787 mm3. © 2014 Wiley Periodicals, Inc. Int J RF and Microwave CAE 24:544–548, 2014.

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Design of convoluted wire antennas using a genetic algorithm

Cited by 5 publications

References 8 publications

Comparison of solutions to the scatterometry inverse problem

Comparison of solutions to the scatterometry inverse problem

Optimal Design of Marine Motors for Joint Efficiency and Economic Optimization

Band-pass filter design using modified CSRR-DGS

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