Design of Bi-material Pixels of an Uncooled Optic Readout IR FPA

Abstract

The analysis and optimized design of an uncooled optic readout infrared FPA pixel composed of infrared absorption layer SiNx and bi-material beam surface layer Au (also as visible light reflection layer) based on MEMS technology are presented in the paper. By modeling and simulation, the thickness of SiNx, Au and adhesive metal layer, and the thickness matching relationship of these materials are verified, and an optimized bi-material beam of Au\Cr\SiNx(0.29μm\ 5nm\0.4μm, 104μm in equivalent beam length) in the pixel has thermo-mechanical response as high as 2.573×10 -3 rad/K, and the visible light reflector in it remains flat enough.