Design of an Optical Head with Two Phase-Shifted Interference Signals for Direction Detection of Small Displacement in an Absolute Surface Encoder
Ryo Sato,
Tao Liu,
Satoru Maehara
et al.
Abstract:This paper presents the design and construction of a new optical head with two phase-shifted interference signals in an absolute surface encoder by using a mode-locked femtosecond laser. A series of discrete absolute positions of the scale grating is obtained from a series of peak wavelengths of the spectrum of the +1st- or -1st-order diffracted beam. The two beams at a specific wavelength λi interfere with each other to generate an incremental interference signal for high-resolution displacement measurement o… Show more
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