Design of An Improved Micro-Electro-Mechanical-Systems Switch for RF Communication System

Abstract

This paper presents the design of improved MEMS shunt switch for RF communication applications. The switch was designed to provide a better performance in 10-100 GHz range. The switch was optimized in terms of width of the beam and air gap between the fixed type beam and dielectric layer to improve the isolation, insertion, and return loss. This study concludes that materials with high k-dielectrics and high Young's modulus are desirable for better performance in highfrequency range. The isolation, insertion, and return loss for the designed switch are obtained as -12 dB, -0.05 dB, and -45 dB, respectively.

MEMS Technology for Early Stage Diesis Detection Using Micro-Cantilever Structure in Support of Biomedical Applications

“…In the year 2021, Mouro, J. et al explain about the dynamic responses of the microcantilever and further possibilities of modifications (1).Junyuan Zhao et alhas been implemented protein biomarkers by using gold nanoparticles in the same year(2). Kim,W.et alhas find the facts of motion detection using microcantilevers during 2020,it was based on knife edge (3).Zahid Mehmood(2020) (11).M.Mohammadi(2019) et al contributed the principles of vibrational analysis and its applications (12).H.Chen(2018) et aldone the research on CMOS -MEMS inductors (17). P.G.…”