2022
DOI: 10.3390/ma15207311
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Design of Ag/TiO2/Ag Composite Nano-Array Structure with Adjustable SERS-Activity

Abstract: How to fabricate large area controllable surface-enhanced Raman scattering (SERS) active nanostructure substrates has always been one of the important issues in the development of nanostructure devices. In this paper, nano-etching technology and magnetron sputtering technology are combined to prepare nanostructure substrate with evolvable structure, and Ag/TiO2/Ag composites are introduced into the evolvable composite structure. The activity of SERS is further enhanced by the combination of TiO2 and Ag and the… Show more

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“…NSL is a widely used manufacturing method to produce large-scale biosensor array structures with a relatively simple process [ 40 ]. Ordered and uniform plasmonic array structures can be prepared based on closely arranged micro-spheres formed by capillary force between colloidal spheres [ 41 , 42 ]. Colloidal spheres can be self-assembled into monolayer or multilayer and then combined with deposition, RIE, wet etching, annealing and other methods to produce a variety of complex periodic two-dimensional or three-dimensional plasmonic structures [ 43 , 44 , 45 ], such as nano holes, nano bowls, nano columns, nano cones and so on [ 46 ].…”
Section: Fabrication Of Sensing Structure In Plasmonic Biosensorsmentioning
confidence: 99%
“…NSL is a widely used manufacturing method to produce large-scale biosensor array structures with a relatively simple process [ 40 ]. Ordered and uniform plasmonic array structures can be prepared based on closely arranged micro-spheres formed by capillary force between colloidal spheres [ 41 , 42 ]. Colloidal spheres can be self-assembled into monolayer or multilayer and then combined with deposition, RIE, wet etching, annealing and other methods to produce a variety of complex periodic two-dimensional or three-dimensional plasmonic structures [ 43 , 44 , 45 ], such as nano holes, nano bowls, nano columns, nano cones and so on [ 46 ].…”
Section: Fabrication Of Sensing Structure In Plasmonic Biosensorsmentioning
confidence: 99%