Design of a Piezoelectric-Driven Tilt Mirror for a Fast Laser Scanner

Abstract

Recently, laser scanners have been used for laser processing such as cutting, welding, and grooving, especially in the automotive industry. The laser scanners need a high-speed driving to minimize cracks caused by thermal shock of brittle materials. Therefore, a novel laser processing system that is composed of a laser source and a piezoelectric-driven tilt mirror to control the reflection angle of the laser beam, and a stage equipped with the tilt mirror has been investigated. In this study, a piezoelectric-driven tilt mirror is designed and analyzed for scanning performance to achieve a beam spot of 30 µm, a pattern width of 1 mm, an overlap ratio of 70% of the circle area, and a scanning speed of 1 m/s. Then, structural analysis of the tilt mirror with three piezoelectric actuators is performed to determine the maximum reflection angle and resonance frequency. Finally, a prototype tilt mirror is fabricated and its basic characteristics are experimentally investigated and discussed.

A systematic identification approach for biaxial piezoelectric stage with coupled Duhem-type hysteresis

“…Piezoelectric stage has been extensively used in many cutting-edged applications, such as ophthalmic surgery robot (Enayati et al, 2016), electronic packaging (Liang et al, 2015), fast COMPEL 40,3 358 tool servo mechanism (Zhu et al, 2014) and laser machining (Park et al, 2012). The reason why it is so attractive is that it can provide perfect performances in terms of fast responses, high precision, limitless resolution, etc.…”

Structural parameter design method for a fast-steering mirror based on a closed-loop bandwidth

“…FSMs have been widely used in many fields, such as imaging [2,3] and laser processing systems [4], free-space optical communications [5,6], and laser weaponry [7,8]. With a high bandwidth, FSMs are capable of fast response and good disturbance rejection [9].…”

Endoscopic Laser Surgery: Design, Modeling, and Control

“…The consequence of this strong demand is the emergence of an active research area concerning the development of actuated mirrors for laser beam steering. Various steering techniques were investigated in the literature: Risley prisms [16], metastable adjustable prism, compact and integrated galvanometers [17], pan-tilt mirror [18], and mirror driven by piezoelectric actuators [19].…”