“…In summary, for optimum coupling, the distance of the 2.45 GHz PAM to the plasma can be ∼2 cm longer than the 2.45 GHz FAM, and 4 cm longer than the 4.6 GHz FAM, respectively. As shown in [20], the density at the antenna mouth for optimum coupling for 2.45 GHz PAM lies slightly below the cut-off density (n e_co = 0.74 × 10 17 m −3 ), namely, around 0.5 × 10 17 m −3 . Regarding the 4.6 GHz FAM with n e_co = 2.6 × 10 17 m −3 , the density for optimum coupling is about 10 × 10 17 m −3 , according to the previous modeling in [21].…”