Design of a novel MEMS implantable blood pressure sensor and stress distribution of parylene-based coatings

You, Zhiwei; Wei, Lei; Zhang, Mingliang; Fh, Yang; Wang, Xiaodong

doi:10.1109/icsict55466.2022.9963268

Cited by 3 publications

(5 citation statements)

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“…Thirdly, for microsensors requiring a biocompatible or hermetic seal for chronic implantation, a conformal coating of low-Young’s-modulus polymers can preserve the designed sensing capability [ 36 , 39 ]. To ensure strong adhesion and durability of the added coating for a long-term deployment, silanes like APTES can serve as a primer for top-coating with Parylene for in vivo applications [ 40 ] or be mixed with polyurethane as a hybrid composite for ex vivo applications [ 41 ].…”

Section: Discussionmentioning

confidence: 99%

“…To ensure strong adhesion and durability of the added coating for a long-term deployment, silanes like APTES can serve as a primer for top-coating with Parylene for in vivo applications [ 40 ] or be mixed with polyurethane as a hybrid composite for ex vivo applications [ 41 ]. In contrast to using strong polyurethane to modify the mechanical behavior of a microdevice, polymers with a low elasticity modulus like Parylene C can be coated on an APTES-primed surface for encapsulation so that further patterning will not alter the intended mechanical impedance of microdevices [ 36 , 39 , 42 ]. Another low-elastic-strength polymer, polyimide (Kapton), is commonly used in poly(dimethylsiloxane)-based soft lithography with APTES as the bonding agent [ 43 , 44 ].…”

Section: Discussionmentioning

confidence: 99%

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The Role of APTES as a Primer for Polystyrene Coated AA2024-T3

Halford,

Chen

2023

Micromachines

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(3-Aminopropyl)triethoxysilane (APTES) silane possesses one terminal amine group and three ethoxy groups extending from each silicon atom, acting as a crucial interface between organic and inorganic materials. In this study, after APTES was deposited on the aluminum alloy AA2024-T3 as a primer for an optional top coating with polystyrene (PS), its role with regard to stability as a protection layer and interaction with the topcoat were studied via combinatorial experimentation. The aluminum alloy samples primed with APTES under various durations of concentrated vapor deposition (20, 40, or 60 min) with an optional post heat treatment and/or PS topcoat were comparatively characterized via electrochemical impedance spectroscopy (EIS) and surface energy. The samples top-coated with PS on an APTES layer primed for 40 min with a post heat treatment revealed excellent performance regarding corrosion impedance. A primed APTES surface with higher surface energy accounted for this higher corrosion impedance. Based on the SEM images and the surface energy calculated from the measured contact angles on the APTES-primed surfaces, four mechanisms are suggested to explain that the good protection performance of the APTES/PS coating system can be attributed to the enhanced wettability of PS on the cured APTES primer with higher surface energy. The results also suggest that, in the early stages of exposure to the corrosion solution, a thinner APTES primer (deposited for 20 min) enhances protection against corrosion, which can be attributed to the hydrolytic stability and hydrolyzation/condensation of the soaked APTES and the dissolution of the naturally formed aluminum oxide pre-existing in the bare samples. An APTES primer subjected to additional heat treatment will increase the impedance of the coating system significantly. APTES, and silanes, in general, used as adherent agents or surface modifiers, have a wide range of potential applications in micro devices, as projected in the Discussion section.

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Section: Discussionmentioning

confidence: 99%

Section: Discussionmentioning

confidence: 99%

The Role of APTES as a Primer for Polystyrene Coated AA2024-T3

Halford,

Chen

2023

Micromachines

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“…Recent advancements have focused on improving the adhesion, uniformity, and reliability of metal films through innovative deposition techniques, such as sputtering, evaporation, or electroplating [111][112][113]. Moreover, research efforts have been directed towards the development of biocompatible metal coatings for MEMS devices used in biomedical applications, facilitating their integration with biological systems [114,115].…”

Section: Electronics and Semiconductor Industrymentioning

confidence: 99%

Surface Engineering of Metals: Techniques, Characterizations and Applications

Ramezani

Ripin

Pasang

et al. 2023

Metals

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This paper presents a comprehensive review of recent advancements in surface engineering of metals, encompassing techniques, characterization methods and applications. The study emphasizes the significance of surface engineering in enhancing the performance and functionality of metallic materials in various industries. The paper discusses the different techniques employed in surface engineering, including physical techniques such as thermal spray coatings and chemical techniques such as electroplating. It also explores characterization methods used to assess the microstructural, topographical, and mechanical properties of engineered surfaces. Furthermore, the paper highlights recent advancements in the field, focusing on nanostructured coatings, surface modification for corrosion protection, biomedical applications, and energy-related surface functionalization. It discusses the improved mechanical and tribological properties of nanostructured coatings, as well as the development of corrosion-resistant coatings and bioactive surface treatments for medical implants. The applications of surface engineering in industries such as aerospace, automotive, electronics, and healthcare are presented, showcasing the use of surface engineering techniques to enhance components, provide wear resistance, and improve corrosion protection. The paper concludes by discussing the challenges and future directions in surface engineering, highlighting the need for further research and development to address limitations and exploit emerging trends. The findings of this review contribute to advancing the understanding of surface engineering and its applications in various sectors, paving the way for future innovations and advancements.

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“…This feature can be used to make a microsensor chip water/moisture repellent [39]. Third, For micro sensors that require a biocompatible or hermetic seal for chronic implantation, conformal coating of polymers of low Young's modulus can sustain the designed sensing capability [37,40]. To address the adhesion strength and durability of the added coating for a long-term deployment, silanes like APTES can be used as a primer for topcoating with Parylene for applications in vivo [41], or mixed with polyurethane as a hybrid composite for ex-vivo applications [42].…”

Section: Potential Applications To Micro Devicesmentioning

confidence: 99%

“…To address the adhesion strength and durability of the added coating for a long-term deployment, silanes like APTES can be used as a primer for topcoating with Parylene for applications in vivo [41], or mixed with polyurethane as a hybrid composite for ex-vivo applications [42]. As opposed to the use of strong polyurethane in modifying the mechanical behavior of a micro device, the polymers of low elasticity modulus like Parylene C can be coated on an APTES-primed surface for encapsulation, and/or be further patterned without changing the designed mechanical impedance of micro devices [37,40,43]. Polyimide (Kapton), another candidate polymer of low elastic strength, is commonly used in the poly(dimethylsiloxane)-based soft lithography with APTES as the bonding agent [44,45].…”

Section: Potential Applications To Micro Devicesmentioning

confidence: 99%

The Role of APTES as a Primer for Polystyrene Coated AA2024-T3

IV,

Chen

2023

Preprint

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The silane (3-Aminopropyl)triethoxysilane (APTES), possesses one terminal amine group and three ethoxy groups extending from each silicon atom, serving as a crucial interface adherent between organic and inorganic materials. In corrosion prevention, APTES is frequently employed as a primer, with subsequent topcoat as an extra protective layer. This topcoat is particularly useful in covering sites where APTES may exhibit poor bonding, such as those involving Cu or Cu-rich alloying elements. In our study, we applied a thin layer of APTES to cleaned AA2024-T3 samples using concentrated vapor deposition, followed by spin-coating with a diluted PS/acetone solution. Through combinatorial experimentation, we investigated the impact of APTES on the corrosion resistance of the coating system on AA2024-T3. Our findings indicate that a higher surface energy of the APTES primer contributes to better corrosion resistance in the overall coating system. This improvement can be attributed to enhanced wettability achieved by the PS/acetone solution on the cured APTES primer, leading to a more uniform coverage of the dried PS topcoat. Additionally, our research revealed that, in the early stages of exposure to the corrosion solution, a thinner APTES primer enhances protection against corrosion. This effect is attributed to hydrolytic stability mechanisms, and the interactions between hydrolyzation/condensation in soaked APTES and the dissolution of naturally formed aluminum oxide pre-existing in the bare samples. Finally, we observed that an APTES primer subjected to additional heat treatment before topcoating exhibits superior performance in corrosion resistance.

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Design of a novel MEMS implantable blood pressure sensor and stress distribution of parylene-based coatings

Cited by 3 publications

References 5 publications

The Role of APTES as a Primer for Polystyrene Coated AA2024-T3

The Role of APTES as a Primer for Polystyrene Coated AA2024-T3

Surface Engineering of Metals: Techniques, Characterizations and Applications

The Role of APTES as a Primer for Polystyrene Coated AA2024-T3

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