Design of a novel gear-like disk resonator gyroscope with high mechanical sensitivity

Feng, Jun; Zhang, Weiping; Gu, Lixu; Li, Zhaoyang

doi:10.1007/s00542-020-05047-6

Cited by 6 publications

(2 citation statements)

References 22 publications

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“…In order to explain the influences of driving and detecting voltages on the response characteristics of the gyroscope clearly, mechanical sensitivity is considered. Mechanical sensitivity is the ratio of the detecting amplitude to the angular velocity [ 39 , 40 ]. However, for the nonlinear system, the ratio of the detecting amplitude to the angular velocity varies with the angular velocity.…”

Section: Bifurcation Analysesmentioning

confidence: 99%

Bifurcation Analysis of a Micro-Machined Gyroscope with Nonlinear Stiffness and Electrostatic Forces

Zhang

2021

Micromachines

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The bifurcation of the periodic response of a micro-machined gyroscope with cubic supporting stiffness and fractional electrostatic forces is investigated. The pull-in phenomenon is analyzed to show that the system can have a stable periodic response when the detecting voltage is kept within a certain range. The method of averaging and the residue theorem are employed to give the averaging equations for the case of primary resonance and 1:1 internal resonance. Transition sets on the driving/detecting voltage plane that divide the parameter plane into 12 persistent regions and the corresponding bifurcation diagrams are obtained via the singularity theory. The results show that multiple solutions of the resonance curves appear with a large driving voltage and a small detecting voltage, which may lead to an uncertain output of the gyroscope. The effects of driving and detecting voltages on mechanical sensitivity and nonlinearity are analyzed for three persistent regions considering the operation requirements of the micro-machined gyroscope. The results indicate that in the region with a small driving voltage, the mechanical sensitivity is much smaller. In the other two regions, the variations in the mechanical sensitivity and nonlinearity are analogous. It is possible that the system has a maximum mechanical sensitivity and minimum nonlinearity for an appropriate range of detecting voltages.

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Section: Bifurcation Analysesmentioning

confidence: 99%

Bifurcation Analysis of a Micro-Machined Gyroscope with Nonlinear Stiffness and Electrostatic Forces

Zhang

2021

Micromachines

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“…Due to the micro-scale of the resonator, S mech should be improved to prevent the weak angular signal of the gyroscope from being submerged by noise. The design strategy indicates that the main way of improving S mech is to increase the Q value or reduce the frequency split [4]. Thermoelastic damping (TED) is considered as the main energy dissipation mechanism in DRGs.…”

Section: Introductionmentioning

confidence: 99%

Development of a Novel Gear-like Disk Resonator Applied in Gyroscope

Zhang

Feng

et al. 2022

Applied Sciences

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This paper proposes a novel gear-like disk resonator (GDR). The design, fabrication, and characterization of GDR are presented. In comparison with a ring-like disk resonator (RDR), a GDR replaces the circular rings with meander-shaped rings consisting of linear beams. The finite element method (FEM) is implemented, and the simulation results show that the GDR has a much lower frequency and effective stiffness, higher quality factor (Q), and better immunity to crystal orientation error. Affected by high Q and small frequency splits, the mechanical sensitivity (Smech) is shown to increase greatly. GDR and RDR with the same structure parameters are built side-by-side on the same wafer, and prototypes are fabricated through the SOI fabrication technique. The frequency response test and ring-down test are implemented using a readout circuit under a vacuum condition (5 Pa) at room temperature. The frequency split (9.1 Hz) of the GDR is about 2.8 times smaller than that (25.8 Hz) of the RDR without electrostatic tuning. Compared with the RDR, the Q (19.2 k) and decay time constant (0.59 s) of the GDR are improved by 145% and 236%, respectively. The experimental results show great promise for the GDR being used as a gear-like disk resonator gyroscope (GDRG).

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A Comparison of Ring and Disk Resonator Gyroscopes Based on Their Degenerate Eigenmode Shapes

Kumar

Raveendranath²,

Sekhar³

et al. 2022

Microactuators, Microsensors and Micromechanisms

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Design of a novel gear-like disk resonator gyroscope with high mechanical sensitivity

Cited by 6 publications

References 22 publications

Bifurcation Analysis of a Micro-Machined Gyroscope with Nonlinear Stiffness and Electrostatic Forces

Bifurcation Analysis of a Micro-Machined Gyroscope with Nonlinear Stiffness and Electrostatic Forces

Development of a Novel Gear-like Disk Resonator Applied in Gyroscope

A Comparison of Ring and Disk Resonator Gyroscopes Based on Their Degenerate Eigenmode Shapes

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