To improve control performance of parallel manipulator, servo control is optimized according to 2-DOF control with Internal Model Control. Position loop of the controller is redesigned based on the original current loop and speed loop. The hybrid force/position control strategy on the basis of cross-coupling is proposed. With mechatronic cosimulation system, it is proved that the force/position hybrid control on the basis of 2-DOF Internal Model Control has better stability and position precision compared with the traditional PID control. The control precision and stability of the parallel manipulator are improved effectively in actual experiment. Two types of compliance operation including peg in hole and surface tracking are realized in 6PUS-UPU parallel manipulator and both have good applicable effect.