Design of a Microactuator Array Against the Coupled Nature of Microelectromechanical Systems (MEMS) Processes

Kim, S.G.; Koo, Minseong

doi:10.1016/s0007-8506(07)62905-9

Cited by 19 publications

(5 citation statements)

References 3 publications

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“…AD can provide product-design-development framework to mitigate the complexity by developing adequate design and manufacturing processes for new materials and by creating new functionalities at the systems level. By decoupling the coupled micro and nano systems design at the early design stage, successful MEMS products and processes have been developed such as thin-film micro mirror array for projection display [10], directed assembly for individual carbon nanotube [11], dropon-demand process for piezoelectric MEMS devices [12], and high temperature stable nanostructured solar absorbers and selective emitters [13], among others.…”

Section: Value Of Axiomatic Design Experiences I: Solving Design Probmentioning

confidence: 99%

Axiomatic Design: 30 Years After

Nordlund¹,

Lee

Kim

2015

Volume 15: Advances in Multidisciplinary Engineering

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In 1977, Nam P Suh proposed a different approach to design research. Suh's approach was different in that it introduced the notions of domains and layers in a 2-D design thinking and stipulated a set of axioms that describes what is a good design. Following Suh's 2-D reasoning structure in a zigzagging manner and applying these axioms through the design process should enable the designer to arrive at a good design.In this paper, we present our own experiences in applying Suh's theories to software design, product design, organizational design, process design, and more in both academic and industrial settings. We also share our experience from teaching the Axiomatic Design theory to students at universities and engineers in industry, and draw conclusions on how best to teach and use this approach, and what results one can expect.The merits of the design axioms are discussed based on the practical experiences that the authors have had in their application. The process developed around the axioms to derive maximum value (solution neutral environment, design domains, what-how relationship, zig-zag process, decomposition, and design matrices) is also discussed and some updates are proposed.

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Section: Value Of Axiomatic Design Experiences I: Solving Design Probmentioning

confidence: 99%

Axiomatic Design: 30 Years After

Nordlund¹,

Lee

Kim

2015

Volume 15: Advances in Multidisciplinary Engineering

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“…The applications for microscale actuators span several fields where fast, small form factor actuation is required. Direct actuation is needed in micro-optics and electronics, where micro-actuators are required to activate relays, switches and mirror arrays [2][3][4]. Micro-actuators drive pumps and valves in micro-total analysis system (m-TAS) [5], and other micro-fluidic or small volume chemistry systems such as lab on a chip (LOC) system [6] and ink jet print heads [7], among others.…”

Section: Introductionmentioning

confidence: 99%

Folding assembly of micro-actuators

2008

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“…Consequently a flexible new approach is needed to easily and effectively deposit high quality PZT thin films in MEMS applications. [5].…”

Section: Introductionmentioning

confidence: 99%

Optimizing Direct Printing of PZT Thin Films

Bathurst¹,

Jeon²,

Lee³

et al. 2008

2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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We recently reported a new method for depositing lead zirconate titanate (PZT) thin films via thermal ink jet (TIJ) printing of a modified sol-gel [1]. The use of PZT in MEMS has been limited due to the lack of process compatibility with existing MEMS manufacturing processes. Direct printing of PZT thin films eliminates the need for photolithographic patterning and etching, allows for controlled deposition over non-planar topographies, and enables the fabrication of devices with varying thickness which cannot be accomplished with conventional spin coating processes. This paper reports conditions of deposition and crystallization for PZT thin films via thermal ink jet printing. Included are details of the solution chemistry developed, printing conditions required for MEMS quality films, and thermal processing parameters that enable a strong piezoelectric response.

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Design of a Microactuator Array Against the Coupled Nature of Microelectromechanical Systems (MEMS) Processes

Cited by 19 publications

References 3 publications

Axiomatic Design: 30 Years After

Axiomatic Design: 30 Years After

Folding assembly of micro-actuators

Optimizing Direct Printing of PZT Thin Films

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