2008
DOI: 10.1080/15599610802081779
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Design of a MEMS Tunable Polymer Grating for Single Detector Spectroscopy

Abstract: High-speed, highly sensitive, miniature photospectroscopy techniques suited for a microfluidic platform enable rapid, cost-effective and efficient assays for numerous applications. Guided by these application requirements, we designed and demonstrated an innovative tunable diffraction grating implemented for spectroscopic measurements requiring minimal optics and signal processing. The device includes a flexible polymer microbridge with a nanoimprinted grating pattern on the top surface. Microelectromechanical… Show more

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Cited by 28 publications
(16 citation statements)
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“…As a result, reliable and repeatable data acquisition is achieved. With the grating periodicity known for any actuation voltage level, the wavelength of the monochromatic light incident at the angle of the PMT is calculated using the grating equation, which allows us to construct spectrum plots 12,21. In this measurement, nearly five spectral sweeps within a 5 ms time window can be performed for each passage of a single microsphere in front of the optical fiber probe (Figure 2C).…”
Section: Resultsmentioning
confidence: 99%
“…As a result, reliable and repeatable data acquisition is achieved. With the grating periodicity known for any actuation voltage level, the wavelength of the monochromatic light incident at the angle of the PMT is calculated using the grating equation, which allows us to construct spectrum plots 12,21. In this measurement, nearly five spectral sweeps within a 5 ms time window can be performed for each passage of a single microsphere in front of the optical fiber probe (Figure 2C).…”
Section: Resultsmentioning
confidence: 99%
“…According to equation (5), the relation between spectral width of quasi-monochromatic light source and the difference of FWHM (ΔF) is defined by…”
Section: Sensing Properties Of Modulating the Interdigitated Depthmentioning
confidence: 99%
“…One of horizontal modulated gratings is the accordion grating, which can be stretched perpendicular to the beams (in the plane of the grating). This changes the period of the grating and hence the wavelength diffracted at a particular angle or the [4] and miniature spectrometer [5]. In this paper, we propose a new horizontal modulated grating which is based on interdigitated comb structures.…”
Section: Introductionmentioning
confidence: 99%
“…Previous work in the area of strain-tunable optical devices, which have exploited far-field phenomena, include strain-tunable filters, 13 reflectors, 14 and gratings, 15 and dynamic color tuning. 16 Work involving near-field phenomena has included strain-tunable surface plasmon resonance, 17,18,19,20 fano resonance, 21 and controlling SERS activity .…”
Section: Introductionmentioning
confidence: 99%