Design of a MEMS-based motion stage based on a lever mechanism for generating large displacements and forces

Abstract

Conventional miniaturized motion stages have a volume of 50-60 cm 3 and a range of motion around 100 μm. Micro-electro-mechanical systems (MEMS)-based motion stages have been good alternatives in some applications for small footprint, micron-level accuracy, and a lower cost. However, existing MEMS-based motion stages are able to provide a force of μN level, small displacements (less than tens of microns), and need additional features for practical applications like a probe or a stage. In this paper, a single degree of freedom motion stage is designed and analyzed for a larger displacement, a larger output force, a smaller out-ofplane deformation, and a bigger moving stage for further applications. For these purposes, the presented motion stage is designed with a thermal actuator, folded springs, and a lever, and it is experimentally characterized. Furthermore, three different types of flexure joints are investigated to characterize their capabilities and suitability to serve as the revolute joint of the lever: a beam, a cartwheel, and a butterfly flexure. The presented motion stage has a moving stage of 15 mm × 15 mm and shows a maximum displacement over 80 μm, and out-of-plane deformation under a weight of 120 μN less than 2 μm. The force generated by the actuator is estimated to be 68.6 mN.

Micro Motion Amplification–A Review

“…In the work of Bergna et al for nano-positioning systems, a MEMS chevron structure is implemented for a thermal actuator, demonstrating displacement of 5 µm [28]. This displacement is further amplified by flexure structures to strokes up to 80 µm [29].…”

“…A characteristic example of optimized linear and rotational MEMS flexures is the Si flexures of Kim et al shown in Fig. 11 [29].…”

Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor

“…Micro-Electro-Mechanical Systems (MEMS) service platforms are attractive in various applications, such as micro motors, micro robots and micro optical lens scanners [1][2][3][4][5][6][7][8][9][10]. Most MEMS service platforms are composed of MEMS actuators, flexure pivots, springs and shuttles that are designed to produce appropriate motions.…”

Temperature stable rare earth magnetic powder Sm-Fe-N based micro magnets with remanence enhanced by easy axis alignment and its application in MEMS actuator

“…For example, a motion stage based on lever mechanism was reported to achieve almost 100 µm by utilizing electro-thermal actuation [7]. An electrothermal actuator with displacement larger than 200 µm microns was achieved in [8].…”