Design of a Long Stroke Nanopositioning Stage With Self-Damping Actuator and Flexure Guide

Zhang, Chi; Huang, Xiaolu; Yang, Miao; Chen, Chin-Yin; Yang, Guilin

doi:10.1109/tie.2021.3126981

Cited by 11 publications

(2 citation statements)

References 30 publications

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“…Zhang designed a nanopositioning stage employing the self-damping moving magnet actuator (SMMA) for long-stroke operation, supported by flexure guides. This system delivers 20 nm resolution within a ±5 mm motion range and maintains tracking errors below 0.1% of trajectory amplitudes at 1 Hz sinusoidal and triangular commands [21]. Yang designed a longstroke nanopositioning stage with annular flexure guides and the classical feed-forward PID (FFPID) controller, achieving a ±5 mm motion range, 20 nm resolution, and 20 nm positioning accuracy at the maximum output position [22].…”

Section: Introductionmentioning

confidence: 99%

Design and Testing of a Compliant ZTTΘ Positional Adjustment System with Hybrid Amplification

Liao,

Lin,

Tang

et al. 2024

Micromachines

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This article presents the design, analysis, and prototype testing of a four-degrees-of-freedom (4-DoFs) spatial pose adjustment system (SPAS) that achieves high-precision positioning with 4-DoFs (Z/Tip/Tilt/Θ). The system employs a piezoelectric-driven amplification mechanism that combines a bridge lever hybrid amplification mechanism, a double four-bar guide mechanism, and a multi-level lever symmetric rotation mechanism. By integrating these mechanisms, the system achieves low coupling, high stiffness, and wide stroke range. Analytical modeling and finite element analysis are employed to optimize geometric parameters. A prototype is fabricated, and its performance is verified through testing. The results indicate that the Z-direction feed microstroke is 327.37 μm, the yaw motion angle around the X and Y axes is 3.462 mrad, and the rotation motion angle around the Z axis is 12.684 mrad. The x-axis and y-axis motion magnification ratio can reach 7.43. Closed-loop decoupling control experiments for multiple-input-multiple-outputs (MIMO) systems using inverse kinematics and proportional-integral-derivative feedback controllers were conducted. The results show that the Z-direction positioning accuracy is ±100 nm, the X and Y axis yaw motion accuracy is ±2 μrad, and the Z-axis rotation accuracy is ±25 μrad. Due to the ZTTΘ mechanism, the design proved to be feasible and advantageous, demonstrating its potential for precision machining and micro-nano manipulation.

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Section: Introductionmentioning

confidence: 99%

Design and Testing of a Compliant ZTTΘ Positional Adjustment System with Hybrid Amplification

Liao,

Lin,

Tang

et al. 2024

Micromachines

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show abstract

“…Nanopositioning systems have been employed in a variety of engineering applications, such as biological micromanipulation and scanning probe microscopes [1]- [4]. Due to fast response and large blocking force, piezoelectric actuators have been often adopted to drive the nanopositioning stage to generate the nanometer resolution of motion [5]- [8]. Notably, the piezoelectric actuators also introduce hysteresis and creep nonlinearities into the nanopositioning system.…”

Section: Introductionmentioning

confidence: 99%

Reinforcement Learning-Based Adaptive Control of a Piezo-Driven Nanopositioning System

Chen,

2024

IEEE Open J. Ind. Electron. Soc.

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This paper proposes a new reinforcement learning (RL)-based adaptive control design for precision motion control of a two-degree-of-freedom piezoelectric XY nanopositioning system. In this design, an actor-critic structure is developed to eliminate the effects of uncertain nonlinearities and cross-coupling motion between the two working axes. Then, an adaptive parameter adjustment mechanism is designed to optimize the control performance without a priori knowledge of the unknown perturbations. The effectiveness and superiority of the proposed method are verified by performing simulation and experimental studies. The results show that the proposed RL-based adaptive control method provides a better robust performance and smaller tracking error for the nanopositioning system.INDEX TERMS Motion control, nanopositioning, piezoelectric actuator, reinforcement learning adaptive control.

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On the actuation nonlinearity of normal-stressed electromagnetic nanopositioning stages

Chen,

Liu,

Zhu

et al. 2024

Precision Engineering

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Design of a Long Stroke Nanopositioning Stage With Self-Damping Actuator and Flexure Guide

Cited by 11 publications

References 30 publications

Design and Testing of a Compliant ZTTΘ Positional Adjustment System with Hybrid Amplification

Design and Testing of a Compliant ZTTΘ Positional Adjustment System with Hybrid Amplification

Reinforcement Learning-Based Adaptive Control of a Piezo-Driven Nanopositioning System

On the actuation nonlinearity of normal-stressed electromagnetic nanopositioning stages

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