Design of a dual-stage, three-axis hybrid parallel-serial-kinematic nanopositioner with mechanically mitigated cross-coupling

Nagel, William S.; Leangy, Kam K.

doi:10.1109/aim.2017.8014100

Cited by 14 publications

(2 citation statements)

References 15 publications

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“…Several techniques are described in the literature to decouple the cross-coupling displacements. Nagel et al [23] have proposed an analytical cross-coupling model for a hybrid serial-parallel kinematic type nanopositioner. The static and geometric formation of the design is modified to reduce the cross-coupling displacement by incorporating the analytical model.…”

Section: Introductionmentioning

confidence: 99%

Investigations on piezo actuated micro XY stage for vibration-assisted micro milling

Prabhu

Rao

2021

J. Micromech. Microeng.

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Vibration assisted machining is an advanced non-conventional precision machining technique aiming at improving the machining performance by superimposing a small amplitude, high-frequency vibration either on the tool or on the workpiece. This article presents the mechanical design, electromechanical simulation, and experimentation on the developed prototype of the flexural hinged micro XY stage for the vibration-assisted micro-milling system. The micro XY stage comprises three layers of flexural hinge structure surrounding the central parallel kinematic structure. The finite element analysis method is adopted to evaluate the static structural stiffness and harmonic behaviour. Two multilayer piezoelectric stack actuators drive the micro XY stage in X and Y directions. The experimental results show that the micro XY stage has a vibrating work area of 17.06 µm × 17.11 µm with a hysteresis nonlinearity and cross-coupling displacements on both axes. Therefore, an electromechanical model is essential to compensate for the hysteresis behaviour and cross-coupling displacements. Open-loop tracking control experiments determine the accuracy of the developed electromechanical model. Implementing a combined hysteresis and cross-coupling displacement compensation approach into the electromechanical model resulted in an open-loop tracking error of 7% for the synchronised circular path and a maximum deviation of 0.6 µm from the linear path.

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Section: Introductionmentioning

confidence: 99%

Investigations on piezo actuated micro XY stage for vibration-assisted micro milling

Prabhu

Rao

2021

J. Micromech. Microeng.

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“…They showed that an asymmetrical parallel guide mechanism could be implemented to reduce the cross error in the x and y directions while increasing the out-of-plane stiffness. Nagel et al [38] predicted the dual-stage, three-axis hybrid parallel-serial-kinematic nano-positioner's parasitic motion by introducing a new parallel-kinematic mechanism that can eliminate the effects of planar coupling. Their results also indicated the potential of the non-orthogonal mechanical amplifier design in minimizing the widespread cross-coupling nonlinearity of the parallel-kinematic designs.…”

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confidence: 99%

A Parametric Study of Mechanical Cross-Coupling in Parallel-Kinematics Piezo-Flexural Nano-Positioning Systems

Shafiee¹,

Ahmadian²,

Akbari³

2021

OJAppS

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Piezo-electric nano-positioning stages are being widely used in applications in which precision and accuracy in the order of nano, and high scanning speeds are paramount. This paper presents a Finite Element Analysis (FEA) of the parallel piezo-flexural nano-positioning (PPNP) stages to investigate motion interference between their different axes. Cross-coupling is one of the significant contributors to undesirable runouts in the precision positioning of PPNP actuators. Using ABAQUS/CAE 2018 software, a 3D model of a PPNP stage was developed. The model consists of a central elastic body connected to a fixed frame through four flexural hinges. A cylindrical stack of multiple piezoelectric disks is placed between the moving central body and the fixed frame. Extensive simulations were carried out for three different friction coefficients in the piezoelectric disks' contact surfaces, different frame materials, and different geometrical configurations of the stage and the hinges. As a result, it was observed that the primary root cause of the mechanical crosscoupling effect could be realized in the combination of the slip and rotation of the piezoelectric disks due to their frictional behavior with the stage moving in the tangential direction, concurrent with changes in the geometry of the stage.

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Mechanical Design and Control for Speed and Precision

Nagel¹,

Leang²

2019

Encyclopedia of Systems and Control

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Design of a dual-stage, three-axis hybrid parallel-serial-kinematic nanopositioner with mechanically mitigated cross-coupling

Cited by 14 publications

References 15 publications

Investigations on piezo actuated micro XY stage for vibration-assisted micro milling

Investigations on piezo actuated micro XY stage for vibration-assisted micro milling

A Parametric Study of Mechanical Cross-Coupling in Parallel-Kinematics Piezo-Flexural Nano-Positioning Systems

Mechanical Design and Control for Speed and Precision

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