Design, modelling, and characterization of display compatible pMUT device

Huang, Chih-Hsien; Gao, Hang; Torri, Guilherme Brondani; Mao, Shengping; Jeong, Yongbin; Cheyns, David; Rochus, Véronique; Rottenberg, Xavier

doi:10.1109/eurosime.2018.8369931

Cited by 13 publications

(9 citation statements)

References 6 publications

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“…In 2018, Huang et al developed analytical models to calculate frequency response in mechanical domain and pressure-output values in acoustic domain. Resonance frequencies were characterized; however, the model was not applied to water-loaded condition where most of the ultrasound imaging happens [32]. In 2019, Ajay Dangi et al designed a ring-pMUT device for endoscopic imaging application [19].…”

Section: Historical Development Of Pmut'smentioning

confidence: 99%

Review of pMUTs for medical imaging: towards high frequency arrays

Shivalingaprasad¹,

Arora²,

Krishnan³

2023

Biomed. Phys. Eng. Express

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pMUT (piezoelectric Micromachined Ultrasound Transducer) devices are an alternative that can overcome the limitations associated with conventional ultrasound transducers. pMUT’s are reported for many applications such as range-finding, biometrics, and ultrasound imaging. However, pulse-echo measurements from fabricated pMUT devices/arrays are not commonly reported in literature, a reason being lack of desirable performance either in transmit or receive mode of operation. There is also limited information about the design, fabrication and characterization of 2D-pMUT-arrays operating at high frequencies (>15 MHz) in water medium. In this paper we review ‘state-of-the-art’ for pMUT-array based medical ultrasound imaging, with a focus on their pulse-echo imaging capability. Over the next 3-5 years, we expect further improvement in piezoelectric thin film deposition techniques, on-chip integration of pre-amplification circuits and further miniaturization of pMUT devices, thus paving the way for development of pMUT-array based high frequency medical imaging systems.

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Section: Historical Development Of Pmut'smentioning

confidence: 99%

Review of pMUTs for medical imaging: towards high frequency arrays

Shivalingaprasad¹,

Arora²,

Krishnan³

2023

Biomed. Phys. Eng. Express

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“…The vertical displacement of the center of the resonating sensor is measured at LDV [12] and the output signal measured at LDV and the input signal from the function generator are simultaneously observed by the oscilloscope. The input voltage is carefully selected so that the displacement at the resonance does not saturate the vibrometer detector sensor.…”

Section: Methodsmentioning

confidence: 99%

MEMS particle sensor based on resonant frequency shifting

Choi

Park

2020

Micro and Nano Syst Lett

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Recently, as the concentration of fine dust in the atmosphere has increased due to an increase in the use of fossil fuel power plants, automobiles, and factories, it has been increasingly important to measure fine dust in the atmosphere. This is because exposure to fine dust is closely related to the incidence of respiratory and cardiovascular diseases and eventually affects mortality. In this paper, we introduce a MEMS particle sensor based on the resonance frequency shift according to added particle mass. The actuation is driven by Aluminum nitride (AlN), and the total thickness is 2.8 μm. A laser doppler vibrometer (LDV), an optical measuring instrument, was used to measure the resonance frequency of the sensor. Airborne particles naturally were deposited on the sensor. To show the frequency shift according to the particle mass, the frequency shift was measured by dividing the case where the deposited particle mass was small and large. In each case, the frequency shift according to the deposited particle mass was predicted and compared with the frequency shift measured by LDV. It was shown that the deposited particle mass and frequency shift are proportional. The deposition of particulate mass was estimated by image analysis. The frequency shift caused by the particle mass deposited on the sensor was defined as the sensitivity of the sensor. The estimated sensitivity of the sensor is 0.219 to 0.354 kHz/pg.

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“…In order to fully evaluate the performances of the dMUT system and its energy consumption, we need to simulate the full pMUT circuital model. Here we are choosing to use the Mason model [30][31][32] as shown in Figure 2 that models the electrical, mechanical, and ultrasound domain. The electrical domain contains the static capacitance C 0 is mainly responsible for the voltage gain of the dMUT.…”

Section: Modeling Of An Individual Pmutmentioning

confidence: 99%

“…Figure 2. Mason circuital model of the pMUT[30][31][32]. Electrical, mechanical, and ultrasound domains are fully modeled.…”

mentioning

confidence: 99%

Modeling and Optimization of Directly Modulated Piezoelectric Micromachined Ultrasonic Transducers

Pop

Herrera

Cassella

et al. 2020

Sensors

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The present work details a novel approach to increase the transmitting sensitivity of piezoelectric micromachined ultrasonic transducer arrays and performing the direct modulation of digital information on the same device. The direct modulation system can reach 3× higher signal-to-noise ratio level and 3× higher communication range (from 6.2 cm boosted to 18.6 cm) when compared to more traditional continuous wave drive at the same energy consumption levels. When compared for the same transmission performance, the direct modulation consumes 80% less energy compared to the continues wave. The increased performance is achieved with a switching circuit that allows to generate a short high-AC voltage on the ultrasonic array, by using an LC tank and a bipolar junction transistor, starting with a low-DC voltage, making it CMOS-compatible. Since the modulation signal can directly be formed by the transmitted bits (on/off keying encoding) this also serve as the modulation for the data itself, hence direct modulation. The working principle of the circuit is described, optimization is performed relative to several circuital parameters and a high-performance experimental application is demonstrated.

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Design, modelling, and characterization of display compatible pMUT device

Cited by 13 publications

References 6 publications

Review of pMUTs for medical imaging: towards high frequency arrays

Review of pMUTs for medical imaging: towards high frequency arrays

MEMS particle sensor based on resonant frequency shifting

Modeling and Optimization of Directly Modulated Piezoelectric Micromachined Ultrasonic Transducers

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