Design, modeling, fabrication and testing of a MEMS capacitive bending strain sensor

Aebersold, Julia; Walsh, Kevin M.; Crain, Mark M.; Voor, Michael J.; Martin, Michael; Hnat, William P.; Lin, Ji-Tzuoh; Jackson, Douglas; Naber, John

doi:10.1088/1742-6596/34/1/021

Cited by 6 publications

(6 citation statements)

References 5 publications

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“…The detailed characterization of the sensitivities on strain, temperature and humidity and the linearity of the sensor capacitance on strain are aspects that have not yet systematically been taken into account for capacitive strain gauges (Matsuzaki et al, 2007;Aebersold et al, 2006;Arshak et al, 2000). The sensor structures have significant cross sensitivities against temperature and humidity.…”

Section: Discussionmentioning

confidence: 99%

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Capacitive strain gauges on flexible polymer substrates for wireless, intelligent systems

Zeiser

Fellner

Wilde

2014

J. Sens. Sens. Syst.

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Abstract. This paper presents a novel capacitive strain gauge with interdigital electrodes, which was processed on polyimide and LCP (liquid crystal polymer) foil substrates. The metallization is deposited and patterned using thin-film technology with structure sizes down to 15 µm. We determined linear strain sensitivities for our sensor configuration and identified the most influencing parameters on the output signal by means of an analytical approach. Finite-element method (FEM) simulations of the strain gauge indicated the complex interaction of mechanical strains within the sensitive structure and their effect on the capacitance. The influence of geometry and material parameters on the strain sensitivity was investigated and optimized. We implemented thin films on 50 µm thick standard polymer foils by means of a temporary bonding process of the foils on carrier wafers. The characterization of the strain sensors after fabrication revealed the gauge factor as well as the cross sensitivities on temperatures up to 100• C and relative humidity up to 100 %. The gauge factor of a sensor with an electrode width of 45 µm and a clearance of 15 µm was −1.38 at a capacitance of 48 pF. Furthermore, we achieved a substantial reduction of the cross sensitivity against humidity from 1435 to 55 ppm % −1 RH when LCP was used for the sensor substrate and the encapsulation instead of polyimide. The gauge factor of a sensor half-bridge consisting of two orthogonal capacitors was 2.3 and the cross sensitivity on temperature was reduced to 240 ppm K −1 . Finally, a sensor system was presented that utilizes a special instrumentation Integrated Circuit (IC). For this system, performance data comprising cross sensitivities and power consumption are given.

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Section: Discussionmentioning

confidence: 99%

“…In the literature, several concepts for capacitive strain sensors were presented recently (Matsuzaki et al, 2007;Aebersold et al, 2006;Arshak et al, 2000). Our approach combines sensor structures processed with thin-film technology and flexible foil substrates with integrated instrumentation ICs.…”

Section: Introductionmentioning

confidence: 99%

Capacitive strain gauges on flexible polymer substrates for wireless, intelligent systems

Zeiser

Fellner

Wilde

2014

J. Sens. Sens. Syst.

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“…From this table, the investigated sensors can be generally categorized into different types according to the output signals, such as the voltage, optical, frequency and so on. Strain gauge, capacitive strain sensor and LVDT are all measuring the deformation based on the change of the output voltage [16][17][18], the sensitivity of the three sensors is enough to detect the micrometer change and the strain gauge sensors have advantages in cost, however, the immunity to the electromagnetic field for such types of sensors is relatively poor but it can be overcome by adding insulator material. SAWR sensor detects the deformation by measuring the change of the frequency and velocity for a produced acoustic wave.…”

Section: Fig 4 Diagram Of Deformation Affected By the Coupled Modelmentioning

confidence: 99%

Condition monitoring of press-pack IGBT devices using Deformation Detection Approach

Gu¹,

Wu²,

Pickert³

et al. 2021

The 10th International Conference on Power Electronics, Machines and Drives (PEMD 2020)

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Press pack Insulated Gate Bipolar Transistors (PP IGBT) are gaining more attention in HVDC power transmission systems due to their high-power density and high reliability compared with conventional power modules. Condition monitoring of PP IGBTs is normally conducted by estimating the chip temperature which is challenging to implement in practice. This paper presents a new parameter, deformation of the upper lid groove, to indicate the health condition of the PP IGBT based on its unique packaging technique. The thermal-mechanical coupled model is built by FE software in order to investigate the relationship between the deformation and junction temperature of the chips. In addition, the several feasible detection methods of deformation have been discussed and utilization of the fiber Bragg grating (FBG) sensor shows the advantages as the most appropriate approach, which can be further developed for condition monitoring using deformation measurements.

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“…Generally, CSGs fall into two categories, parallel-plate [32,33] or interdigitated electrode capacitors [34][35][36]. CSGs with parallel electrodes are sensors composed of a dielectric layer sandwiched by two parallel conductive electrodes.…”

Section: Introductionmentioning

confidence: 99%

A sensitive and flexible interdigitated capacitive strain gauge based on carbon nanofiber/PANI/silicone rubber nanocomposite for body motion monitoring

Hosseini

Hajghassem

Ghazani

2022

Mater. Res. Express

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Stretchable nanocomposites-based strain gauges have received much attention due to their adjustable properties in various applications, including soft robotics, human health monitoring, body motion detection, structural health monitoring, and artificial intelligence. Although low sensitivity (gauge factor) is one of the challenges of capacitive strain gauges, in this study, we design, manufacture, and illustrate characterizations of a stretchable interdigitated capacitive strain gauge based on carbon nanofiber/ polyaniline/ silicone rubber nanocomposite by an improvement in sensitivity with linearity, and low hysteresis. This strain gauge reaches a gauge factor of about 14 over an applied strain of 2% and about 2.8 over an applied strain of 20% and demonstrates linearity with negligible hysteresis. The sensitivity of the strain sensor is enhanced not only by the interdigitated design of electrodes but also by the electrodes' outstanding electrical conductivity, even in a large strain. Due to its sensitivity, the proposed device is suitable for detecting small and large strains and can be used in wearable applications or straight on the skin for human motion detection.

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Design, modeling, fabrication and testing of a MEMS capacitive bending strain sensor

Cited by 6 publications

References 5 publications

Capacitive strain gauges on flexible polymer substrates for wireless, intelligent systems

Capacitive strain gauges on flexible polymer substrates for wireless, intelligent systems

Condition monitoring of press-pack IGBT devices using Deformation Detection Approach

A sensitive and flexible interdigitated capacitive strain gauge based on carbon nanofiber/PANI/silicone rubber nanocomposite for body motion monitoring

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