Design, Modeling and Simulation of MEMS Resonator for Humidity Sensor Application

Mutharpavalar, Ashaashvini; Ahmed, A. Y.; Nor, Nursyarizal Mohd

doi:10.1109/sas48726.2020.9220082

Cited by 4 publications

(3 citation statements)

References 34 publications

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“…Based on those physical changes, a wide variety of capacitive sensors have been developed, ranging from proximity sensing [1][2][3][4][5], position sensing [6,7], humidity sensing [8,9], tilt sensing [10,11], strain sensing [12,13,14], etc. As the capacitance is not dependent on the properties of the plate material, and thermal expansion is generally isotropic in three dimensions, capacitive sensors are generally considered to having low-temperature dependence compared with other sensor methods, such as resistive based [15] or resonant based [16].…”

Section: Introductionmentioning

confidence: 99%

Active Temperature Compensation for MEMS Capacitive Sensor

Seshia

2021

IEEE Sensors J.

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Temperature variations are one of the most crucial factors that need to be compensated for in MEMS sensors. Many traditional methodologies require an additional circuit to compensate for temperature. This work describes a new active temperature compensation method for MEMS capacitive strain sensors without additional circuits. The proposed method is based on a complement 2-D capacitive structure design. It consumes zero-power, which is essential toward the realization of a lowpower temperature-compensated sensor in battery-powered or energyharvesting applications. The gauge factor of the developed MEMS capacitive strain sensor is 7. The best result showing a capacitance variation of 1 ppm/ o C compared with 13 ppm/ o C on conventional design.

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Section: Introductionmentioning

confidence: 99%

Active Temperature Compensation for MEMS Capacitive Sensor

Seshia

2021

IEEE Sensors J.

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“…Capacitive sensors are realized by varying any of the three parameters of a capacitor: the distance between two plates, the overlap area of plates, and the dielectric constant of an insulator. Based on those physical changes, a wide variety of capacitive sensors have been developed, ranging from proximity sensing [1][2][3][4][5], position sensing [6,7], humidity sensing [8,9], tilt sensing [10,11], strain sensing [12,13,14], etc. As the capacitance is not dependent on the properties of the plate material, and thermal expansion is generally isotropic in three dimensions, capacitive sensors are generally considered to having low-temperature dependence compared with other sensor methods, such as resistive based [15] or resonant based [16].…”

Section: Introductionmentioning

confidence: 99%

Active Temperature compensation for MEMS capacitive sensor

Do¹,

Seshia²

2021

Preprint

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Temperature variation is one of the most crucial factors that need to be cancelled in MEMS sensors. Many traditional methodologies require an additional circuit to compensate for temperature. This work describes a new active temperature compensation method for MEMS capacitive strain sensor without any additional circuit. The proposed method is based on a complement 2-D capacitive structure design. It consumes zero-power, which is essential toward the realization of a low-power temperature-compensated sensor in battery-powered or energy-harvesting applications<br>

show abstract

“…Capacitive sensors are realized by varying any of the three parameters of a capacitor: the distance between two plates, overlapped area of plates, and the dielectric constant of an insulator. Based on those physical changes, a wide variety of capacitive sensors have been developed, ranging from proximity sensing [1][2][3][4][5], position sensing [6,7], humidity sensing [8,9], tilt sensing [10,11], strain sensing [12,13,14], etc. As the capacitance is not dependent on the properties of the plate material, and thermal expansion is generally isotropic in three dimensions, capacitive sensors are generally considered to having low-temperature dependence compared with other sensor methods, such as resistive based [15] or resonant based [16].…”

Section: Introductionmentioning

confidence: 99%