Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey
Wei-Wei Huang,
Xiangyuan Wang,
Yixuan Meng
et al.
Abstract:High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast dynamics, high stiffness and nanometer resolution. However, the nonlinear actuation, mechanical vibrational dynamics and multi-axis cross-coupling effect of high-bandwidth NPSs bring severe challenges for their design, modeling and control. Therefore, various state-of-the-art works have been reported over the past decades to deal with thes… Show more
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