Design method for wafer dicing machine base based on calculations
Au-Zou Tai,
Jiunn Fang
Abstract:In recent years, the role of semiconductor industry has become crucial for development in various countries. The semiconductor industry mainly consists of three parts: silicon material production, integrated circuit wafer manufacturing, and integrated circuit packaging. This paper focuses on the analysis of the cutting structure of the backend equipment wafer dicing machine in the integrated circuit packaging process. Currently, the mainstream wafer dicing machines utilize two types of cutting methods: laser c… Show more
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