Design, implementation and testing of electrostatic SOI MUMPs based microgripper

Khan, Fahimullah; Bazaz, Shafaat A.; Sohail, Muhammad

doi:10.1007/s00542-010-1129-2

Cited by 31 publications

(11 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The maximum stress in the mechanical elements, as another design constraint, should be less than the yield stress with an appropriate margin [28]- [30]. Single crystal silicon, the structural material in SOIMUMPs process, is brittle, and its characteristic fracture strength is ∼1.97 GPa with Weibull modulus of 8.9 [28].…”

Section: A Tuning Of the Structural Parametersmentioning

confidence: 99%

A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control

Maroufi

Bazaei

Moheimani

2015

IEEE Trans. Contr. Syst. Technol.

View full text Add to dashboard Cite

Mohammad Maroufi received the B.Sc. degrees in mechanical engineering and applied physics and the M.Sc. degree in mechatronics from the Amirkabir University of Technology, Tehran, Iran, in 2008 and 2011, respectively. He is currently pursuing the Ph.D. degree in electrical engineering with the University of Newcastle, Callaghan, NSW, Australia.His current research interests include design and control of MEMS nanopositioning systems, MEMSbased sensing and actuation, on-chip atomic force microscopy, and mechanical modeling of smart materials and structures.Ali Bazaei (M'10) received the B.Sc. and M.Sc. . His current research interests include nonlinear systems, including control and modeling of structurally flexible systems, friction modeling and compensation, neural networks, and microposition sensors.

show abstract

Section: A Tuning Of the Structural Parametersmentioning

confidence: 99%

A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control

Maroufi

Bazaei

Moheimani

2015

IEEE Trans. Contr. Syst. Technol.

View full text Add to dashboard Cite

show abstract

“…The Loeb-Eiber mass filter used in this work was produced using the multi-user MEMS process (MUMPS) (MEMSCAP Inc., Durham, NC, USA) [43][44][45][46]. The MEMS based mass filter had square cross-section electrodes of 25 μm×25 μm with an 8 μm interelectrode spacing.…”

Section: Methodsmentioning

confidence: 99%

Performance Evaluation of a Loeb-Eiber Mass Filter at 1 Torr

Hoffmann

Feng

Pedder³

et al. 2014

J. Am. Soc. Mass Spectrom.

View full text Add to dashboard Cite

Abstract. The Loeb-Eiber mass filter is best operated at relatively high pressures-such as 1 Torr-where collisional dampening of ions up to the mass filter thermalizes the ions' kinetic energy, which is a requirement for effective filtering. The inter-electrode gaps of~8 μm require rf amplitudes on the order of 0-5 V p-p at approximately 50 MHz to achieve mass filtering up to m/z 40. Mass filtering between the 25-μm diameter wires, therefore, takes place on time frames less than the collision frequency at~1 Torr. The low power and high pressure capabilities of the Loeb-Eiber mass filter make it ideally suited for miniaturization, where power and space are a premium. In the present work, a Loeb-Eiber mass filter was constructed using commercial silicon-on-insulator (SOI) microfabrication techniques. Ions transmitting through the chip-based Loeb-Eiber mass filter were characterized in real time using a traditional linear quadrupole mass analyzer in series with the Loeb-Eiber mass filter. The new hybrid instrument has enabled us to verify several important claims regarding the operation of the Loeb-Eiber mass filter: (1) that ions can be effectively filtered at~1 Torr, (2) that for ions of a fixed mass-to-charge ratio, the ion transmission current decreases linearly with increasing rf amplitude on the Loeb-Eiber mass filter, (3) that the cutoff voltage at which all ions of a particular m/z value are effectively blocked is linearly related to mass-to-charge, and (4) that square waveforms can filter ions more effectively than sinusoidal waveforms for a given peak-to-peak rf amplitude.

show abstract

“…Many electrostatic microgrippers have been developed to manipulate micro-objects [19,20,[34][35][36][37][38][39][40][41][42][43], among which several have been applied to cell manipulation. Kim et al [19] developed the first electrostatic microgripper with overhanging gripping arms through a surface micromachining process, and an etch-stop technique was used to create the overhanging gripping arm structures.…”

Section: Electrostatic Microgrippersmentioning

confidence: 99%

MEMS-based platforms for mechanical manipulation and characterization of cells

Pan

Wang

et al. 2017

J. Micromech. Microeng.

View full text Add to dashboard Cite

Mechanical manipulation and characterization of single cells are important experimental techniques in biological and medical research. Because of the microscale sizes and highly fragile structures of cells, conventional cell manipulation and characterization techniques are not accurate and/or efficient enough or even cannot meet the more and more demanding needs in different types of cell-based studies. To this end, novel microelectromechanical systems (MEMS)-based technologies have been developed to improve the accuracy, efficiency, and consistency of various cell manipulation and characterization tasks, and enable new types of cell research. This article summarizes existing MEMS-based platforms developed for cell mechanical manipulation and characterization, highlights their specific design considerations making them suitable for their designated tasks, and discuss their advantages and limitations. In closing, an outlook into future trends is also provided.

show abstract

Design, implementation and testing of electrostatic SOI MUMPs based microgripper

Cited by 31 publications

References 6 publications

A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control

A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control

Performance Evaluation of a Loeb-Eiber Mass Filter at 1 Torr

MEMS-based platforms for mechanical manipulation and characterization of cells

Contact Info

Product

Resources

About