Design Flow and Methodology on the Design of BAW components

Schmidhammer, E.; Bader, B.; Sauer, Wolfgang; Schmiedgen, M.; Heinze, H.; Eggs, Christoph; Metzger, Thomas

doi:10.1109/mwsym.2005.1516567

Cited by 14 publications

(2 citation statements)

References 8 publications

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“…Transmit and receive bands of the US-PCS standard are close in frequency [3]. This demands BAW resonators which constitute the narrow band filters to be nearly loss-free.…”

Section: Introductionmentioning

confidence: 99%

A design procedure for an acoustic mirror providing dual reflection of longitudinal and shear waves in Solidly Mounted BAW Resonators (SMRs)

Jose

Jansman

Hueting

2009

2009 IEEE International Ultrasonics Symposium

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Abstract-The quality factor of the traditional Solidly Mounted Resonator (SMR) is limited by substrate losses, as the traditionally employed acoustic mirror reflects longitudinal waves but not shear waves. Modern mirrors do reflect both waves, but design rules for such mirrors have not been published so far. We propose a systematic design procedure derived from optics leading to a novel embodiment for the acoustic mirror which effectively reflects both longitudinal and shear waves. This method can be applied for the acoustic mirror design for any given material combination. An analytical model is presented; its agreement with FEM simulations is good. With the optimized design, we can obtain a minimum transmission for longitudinal and shear waves of −25 dB and −20 dB at resonance frequencies for longitudinal and shear waves, respectively, for various reflector material combinations.

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“…Transmit and receive bands of the US-PCS standard are close in frequency [3]. This demands BAW resonators which constitute the narrow band filters to be nearly loss-free.…”

Section: Introductionmentioning

confidence: 99%

A design procedure for an acoustic mirror providing dual reflection of longitudinal and shear waves in Solidly Mounted BAW Resonators (SMRs)

Jose

Jansman

Hueting

2009

2009 IEEE International Ultrasonics Symposium

View full text Add to dashboard Cite

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“…Metallic electrodes promoting the growth of highly c-axis oriented AlN films with single polar orientation and contributing to the confinement of the mechanical energy in the piezoelectric layer are the candidates of choice [8,9]. Metals most frequently used in BAW applications are W [10], Pt [6], and Mo [11], although many others (Al, Ta, Ti, Cu, Cr, Au, Ru, Ir) have been investigated [9,12,13,14]. So far, the besttextured AlN films deposited by sputtering have been obtained on Pt and Ir metallic surfaces, in which the {111} planes exhibit hexagonal symmetry, providing AlN films with very low values of the full width at half maximum (FWHM) of the rocking-curve (RC) around the 00·2 peak (around 0.9º for 1 μ m-thick films) [8,14] and very high piezoelectric activity.…”

Section: Introductionmentioning

confidence: 99%