Design, Fabrication, and Testing of a Novel 3D 3-Fingered Electrothermal Microgripper with Multiple Degrees of Freedom

Si, Guoning; Sun, Liangying; Zhang, Zhuo; Zhang, Xuping

doi:10.3390/mi12040444

Cited by 14 publications

(5 citation statements)

References 41 publications

(35 reference statements)

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“…Compliant micro-gripper is a key component of micro-operation robotic system which plays an important role in micro-operation (Das et al, 2020; Evans et al, 2020; Liu et al, 2022; Shi et al, 2021; Wang et al, 2013). Many micro-grippers have been developed based on different actuators, such as electromagnetic motor, shape memory alloys, voice coil motor, and piezoelectric actuator (PEA) (Ding et al, 2023; Si et al, 2021; Wu and Li, 2021; Xu et al, 2023; Zhang et al, 2015b; Zhou and Ma, 2022). Among of them, PEA is widely used due to advantages of large output force, small volume, zero gap, and fast response.…”

Section: Introductionmentioning

confidence: 99%

Design, analysis, and experimental investigations of an asymmetrical under-actuated micro-gripper

Wu,

Wang,

Chen

et al. 2024

Journal of Intelligent Material Systems and Structures

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In this paper, we present a new asymmetrical under-actuated micro-gripper which can perform twisting and gripping operation to the target simultaneously actuated by a single piezoelectric actuator. Two improved hybrid amplification mechanisms were designed integrated with three different flexure hinges to enhance dynamic performances. Kinematics and dynamics models of the micro-gripper including input stiffness, displacement amplification ratio, and natural frequency based on pseudo-rigid-body method and Lagrange’s equations were derived. Proposed models were evaluated by finite element simulation studies. Experimental results shown that our designed micro-gripper possesses good performance in terms of clamping reliability and dynamic response.

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Section: Introductionmentioning

confidence: 99%

Design, analysis, and experimental investigations of an asymmetrical under-actuated micro-gripper

Wu,

Wang,

Chen

et al. 2024

Journal of Intelligent Material Systems and Structures

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“…Thus, it is helpful to the nano driver (Boudaoud et al, 2018; Wang et al, 2010) of the nanorobot (Garza et al, 2015; Requicha, 2003) and makes it possible for them to become smaller (Bhaskar et al, 2016). The deflection platform phenomenon may also improve the accuracy of the micro-displacement generation system and microgripper (Rakotondrabe and Ivan, 2011; Si et al, 2021; Wang et al, 2013).…”

Section: Introductionmentioning

confidence: 99%

The deflection platform phenomenon of functionally graded flexoelectric simply supported nanobeam

Zheng

Chu

Dui

et al. 2023

Journal of Intelligent Material Systems and Structures

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Direct flexoelectricity appears in dielectrics as a kind of coupling effect of electric field and elastic strain gradient. Its strong size dependence makes it effective in nanostructures. In this paper, based on the flexoelectric theory and mixed finite element method (FEM), the mechanical properties of the two-dimensional functionally graded (FG) flexoelectric nanobeam are studied, and the phenomenon of the deflection platform is found. By applying various types of loads to FG nanobeams, the influence of geometric parameters, length scale, and material distribution on the phenomenon of the deflection platform is discussed. According to the simulation results, it is found that the aspect ratio and the length scale of the beam will change the shape of the deflection platform, making it change regularly among various shapes. The geometric size will greatly increase the height of the platform, but it has little effect on the dimensionless deflection. Reasonable material distribution can enhance the internal coupling effect, increase the height of the platform and reduce the required load. Our results suggest that when studying nano-scale flexoelectric models, the deflection platforms or similar phenomena should be considered.

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“…With the same applying voltage and the similar cover size, the V-shaped achieves a larger output force and displacement than U-and Z-shaped actuators, respectively (Li et al, 2015;Zhang et al, 2021;Shen and Chen, 2013). Therefore, the V-shaped electrothermal microactuator (VEM) is widely applied in various micromachines/devices such as micro gripper (Andersen et al, 2008;Majidi Fard and Hamedi, 2020;Si et al, 2021), nanomaterial testing device (Espinosa et al, 2007), safe thermal device (Hu et al, 2017), linear motor (Maloney et al, 2004) and rotary micromotors (Shen and Chen, 2013;Park et al, 2001). Currently, many heat transfer models of VEM have been proposed and developed to obtain more accurate calculation of the temperature distribution on the V-beam.…”

Section: Introductionmentioning

confidence: 99%

Improving displacement of silicon V-shaped electrothermal microactuator using platinum sputter deposition process

Nam

Pham²,

Hoang³

2023

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Purpose This paper aims to propose a method to reduce the resistance of silicon-based V-shaped electrothermal microactuator (VEM) by applying a surface sputtering process. Design/methodology/approach Four VEM’s samples have been fabricated using traditional silicon on insulator (SOI)-Micro-electro-mechanical System (MEMS) technology, three of them are coated with a thin layer of platinum on the top surface by sputtering technique with different sputtered times and the other is original. The displacements of the VEM are calculated and simulated to evaluate the advantages of sputtering method. Findings The measured results show that the average resistance of the sputtered structures is approximately 1.16, 1.55 and 2.4 times lower than the non-sputtering sample corresponding to the sputtering time of 1.5, 3 and 6 min. Simulation results confirmed that the maximum displacement of the sputtered VEM is almost 1.45 times larger than non-sputtering one in the range of voltage from 8 to 20 V. The experimental displacements are also measured to validate the better performance of the sputtered samples. Originality/value The experimental results demonstrated the better displacement of the VEM structure after using the platinum sputtering process. The improvement can be considered and applied for enhancing displacement as well as decreasing the driving voltage of the other electrothermal microactuators like U- or Z-shaped structures while combining with the low-cost SOI-MEMS micromachining technology.

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Design, Fabrication, and Testing of a Novel 3D 3-Fingered Electrothermal Microgripper with Multiple Degrees of Freedom

Cited by 14 publications

References 41 publications

Design, analysis, and experimental investigations of an asymmetrical under-actuated micro-gripper

Design, analysis, and experimental investigations of an asymmetrical under-actuated micro-gripper

The deflection platform phenomenon of functionally graded flexoelectric simply supported nanobeam

Improving displacement of silicon V-shaped electrothermal microactuator using platinum sputter deposition process

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